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- W2519834876 abstract "In this paper, an electro-thermal-actuated 1×20 MEMS mirror array is designed, fabricated and tested. 20 mirrors are arranged with narrow gaps, an area filled factor 96% is reached. Each mirror is actuated by four independent bimorph actuators aiming to control 2D tilting. Here, a cross-talk is done to reduce thermal cross-talk by downward bimorph structure into a silicon cavity. the result shows that there is a thermal cross-talk about 5%." @default.
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- W2519834876 date "2016-07-01" @default.
- W2519834876 modified "2023-09-27" @default.
- W2519834876 title "A high fill factor 1×20 MEMS mirror array based on ISC bimorph structure" @default.
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- W2519834876 doi "https://doi.org/10.1109/omn.2016.7565912" @default.
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