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• W2519917557 abstract "Abstract In this paper we present the fabrication procedure as well as the preliminary experimental results of a novel method for construction of high resolution nanometric interconnection lines. The fabrication procedure relies on a self-assembly process of gold nanoparticles at specific predetermined nanostructures. The nanostructures for the self-assembly process are based on the focused ion beam (FIB) or scanning electron beam (SEM) technology. The assembled nanoparticles are being illuminated using a picosecond laser with a wavelength of 532 nm. Different pulse energies have been investigated. The paper aimed at developing a novel and reliable process for fabrication of interconnection lines encompass three different disciplines, self-assembly of nanometric particles, optics and microelectronic." @default.
• W2519917557 created "2016-09-23" @default.
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• W2519917557 date "2016-01-01" @default.
• W2519917557 modified "2023-09-28" @default.
• W2519917557 title "High Resolution Fabrication of Interconnection Lines Using Picosecond Laser and Controlled Deposition of Gold Nanoparticles" @default.
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• W2519917557 doi "https://doi.org/10.1016/j.phpro.2016.08.153" @default.
• W2519917557 hasPublicationYear "2016" @default.
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