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• W2520222739 endingPage "10ND03" @default.
• W2520222739 startingPage "10ND03" @default.
• W2520222739 abstract "Multimorph structures composed of multiple thin-film piezoelectric layers and electrode layers were realized by sputtering deposition. Cantilevers with four layers of Pb(Zr,Ti)O3 (PZT) thin film are fabricated and evaluated. The electrical and piezoelectric characteristics of each PZT layer are very similar and are comparable to those of conventional single-layer PZT thin film. The piezoelectric constant d31 is estimated to be −38.3 pm/V from the relationship between tip displacement and applied voltage under the condition of driving four all piezoelectric layers. The generative force is also estimated from the tip displacement. It is confirmed that multimorph cantilevers have larger generative force than those of conventional unimorph and bimorph cantilevers for identical driving voltage." @default.
• W2520222739 created "2016-09-23" @default.
• W2520222739 creator A5004196497 @default.
• W2520222739 creator A5008494460 @default.
• W2520222739 creator A5039328385 @default.
• W2520222739 creator A5042494556 @default.
• W2520222739 creator A5082581976 @default.
• W2520222739 date "2015-09-08" @default.
• W2520222739 modified "2023-10-05" @default.
• W2520222739 title "Fabrication of multilayer Pb(Zr,Ti)O₃thin film by sputtering deposition for MEMS actuator applications" @default.
• W2520222739 cites W1773921663 @default.
• W2520222739 cites W1966074487 @default.
• W2520222739 cites W1966981861 @default.
• W2520222739 cites W1967110057 @default.
• W2520222739 cites W1971537334 @default.
• W2520222739 cites W1977183087 @default.
• W2520222739 cites W1977421569 @default.
• W2520222739 cites W1980393748 @default.
• W2520222739 cites W1997330261 @default.
• W2520222739 cites W2004135485 @default.
• W2520222739 cites W2013497895 @default.
• W2520222739 cites W2013851943 @default.
• W2520222739 cites W2029641632 @default.
• W2520222739 cites W2039140389 @default.
• W2520222739 cites W2051025409 @default.
• W2520222739 cites W2055039798 @default.
• W2520222739 cites W2055297275 @default.
• W2520222739 cites W2058293504 @default.
• W2520222739 cites W2071491909 @default.
• W2520222739 cites W2078809668 @default.
• W2520222739 cites W2097511512 @default.
• W2520222739 cites W2119191613 @default.
• W2520222739 cites W2151603769 @default.
• W2520222739 cites W2152788723 @default.
• W2520222739 cites W2162372488 @default.
• W2520222739 cites W2169884209 @default.
• W2520222739 cites W2171620025 @default.
• W2520222739 cites W2466136881 @default.
• W2520222739 cites W2542971507 @default.
• W2520222739 cites W2911283550 @default.
• W2520222739 cites W2059369291 @default.
• W2520222739 doi "https://doi.org/10.7567/jjap.54.10nd03" @default.
• W2520222739 hasPublicationYear "2015" @default.
• W2520222739 type Work @default.
• W2520222739 sameAs 2520222739 @default.
• W2520222739 citedByCount "31" @default.
• W2520222739 countsByYear W25202227392016 @default.
• W2520222739 countsByYear W25202227392017 @default.
• W2520222739 countsByYear W25202227392018 @default.
• W2520222739 countsByYear W25202227392019 @default.
• W2520222739 countsByYear W25202227392020 @default.
• W2520222739 countsByYear W25202227392021 @default.
• W2520222739 countsByYear W25202227392022 @default.
• W2520222739 countsByYear W25202227392023 @default.
• W2520222739 crossrefType "journal-article" @default.
• W2520222739 hasAuthorship W2520222739A5004196497 @default.
• W2520222739 hasAuthorship W2520222739A5008494460 @default.
• W2520222739 hasAuthorship W2520222739A5039328385 @default.
• W2520222739 hasAuthorship W2520222739A5042494556 @default.
• W2520222739 hasAuthorship W2520222739A5082581976 @default.
• W2520222739 hasConcept C100082104 @default.
• W2520222739 hasConcept C119599485 @default.
• W2520222739 hasConcept C127413603 @default.
• W2520222739 hasConcept C136525101 @default.
• W2520222739 hasConcept C141354745 @default.
• W2520222739 hasConcept C142724271 @default.
• W2520222739 hasConcept C147789679 @default.
• W2520222739 hasConcept C151730666 @default.
• W2520222739 hasConcept C159985019 @default.
• W2520222739 hasConcept C165801399 @default.
• W2520222739 hasConcept C171250308 @default.
• W2520222739 hasConcept C17525397 @default.
• W2520222739 hasConcept C185592680 @default.
• W2520222739 hasConcept C19067145 @default.
• W2520222739 hasConcept C192562407 @default.
• W2520222739 hasConcept C204787440 @default.
• W2520222739 hasConcept C22423302 @default.
• W2520222739 hasConcept C2778393539 @default.
• W2520222739 hasConcept C2779055265 @default.
• W2520222739 hasConcept C2779227376 @default.
• W2520222739 hasConcept C2816523 @default.
• W2520222739 hasConcept C37977207 @default.
• W2520222739 hasConcept C49040817 @default.
• W2520222739 hasConcept C64297162 @default.
• W2520222739 hasConcept C71924100 @default.
• W2520222739 hasConcept C86803240 @default.
• W2520222739 hasConceptScore W2520222739C100082104 @default.
• W2520222739 hasConceptScore W2520222739C119599485 @default.
• W2520222739 hasConceptScore W2520222739C127413603 @default.
• W2520222739 hasConceptScore W2520222739C136525101 @default.
• W2520222739 hasConceptScore W2520222739C141354745 @default.
• W2520222739 hasConceptScore W2520222739C142724271 @default.
• W2520222739 hasConceptScore W2520222739C147789679 @default.
• W2520222739 hasConceptScore W2520222739C151730666 @default.
• W2520222739 hasConceptScore W2520222739C159985019 @default.
• W2520222739 hasConceptScore W2520222739C165801399 @default.
• W2520222739 hasConceptScore W2520222739C171250308 @default.
• W2520222739 hasConceptScore W2520222739C17525397 @default.

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