FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2520278743> ?p ?o ?g. }

• W2520278743 abstract "Angle resolved x-ray photoelectron spectroscopy (ARXPS) has been employed to determine non-destructively the in-depth interface formation during thin film growth. Buried interfaces underneath the nanometer thick layers are probed by identifying the chemical shift of compound materials in photoelectron spectroscopy and using the angular response to quantify the compound amounts from the measured intensities. The thin interfaces in molybdenum-silicon multilayers grown at ambient temperature are investigated. This system is an example of an almost perfect 1D-system, where the interface region is only a small part of the individual layer thicknesses of 3 to 5 nm. Despite the low growth temperature, both the interfaces of this multilayer show layer thickness dependent interface formation. While the silicon-on-molybdenum interface shows a limited interface thickness of 0.4 nm of Mo5Si3, the molybdenum-on-silicon interface shows a more complex evolution. For this interface, the composition of the first 2.0 nm of deposited layer thickness is best described as a molybdenum-silicon compound layer with a molybdenum rich top and a MoSi2 bottom layer. After 2.5 nm of the deposited layer thickness, the molybdenum rich compound at the top has transformed into polycrystalline molybdenum on top of 1.8 nm MoSi2 at the interface. The formation of the 1.8 nm MoSi2 precedes the formation of polycrystalline molybdenum on top. Angle resolved x-ray photoelectron spectroscopy (ARXPS) is shown to be a good tool to study the interface phenomena beneath the nanometer thick top layers. In the case of Mo/Si multilayer mirrors, this ARXPS study shows that the compound formation at the interface accounts for the majority of the extreme ultraviolet reflectance loss." @default.
• W2520278743 created "2016-09-23" @default.
• W2520278743 creator A5013423421 @default.
• W2520278743 creator A5025185970 @default.
• W2520278743 creator A5087582416 @default.
• W2520278743 date "2016-09-16" @default.
• W2520278743 modified "2023-09-27" @default.
• W2520278743 title "In depth study of molybdenum silicon compound formation at buried interfaces" @default.
• W2520278743 cites W1892163592 @default.
• W2520278743 cites W1964256585 @default.
• W2520278743 cites W1967828814 @default.
• W2520278743 cites W1983730600 @default.
• W2520278743 cites W1992214743 @default.
• W2520278743 cites W1998108281 @default.
• W2520278743 cites W2013632376 @default.
• W2520278743 cites W2030257204 @default.
• W2520278743 cites W2037692464 @default.
• W2520278743 cites W2038967395 @default.
• W2520278743 cites W2045259646 @default.
• W2520278743 cites W2048630633 @default.
• W2520278743 cites W2058502747 @default.
• W2520278743 cites W2058512563 @default.
• W2520278743 cites W2061891129 @default.
• W2520278743 cites W2064542815 @default.
• W2520278743 cites W2065545962 @default.
• W2520278743 cites W2082592720 @default.
• W2520278743 cites W2086653004 @default.
• W2520278743 cites W2087169892 @default.
• W2520278743 cites W2094821484 @default.
• W2520278743 cites W2095385495 @default.
• W2520278743 cites W2115885721 @default.
• W2520278743 cites W2127613712 @default.
• W2520278743 cites W2142130098 @default.
• W2520278743 cites W2159791263 @default.
• W2520278743 doi "https://doi.org/10.1063/1.4962541" @default.
• W2520278743 hasPublicationYear "2016" @default.
• W2520278743 type Work @default.
• W2520278743 sameAs 2520278743 @default.
• W2520278743 citedByCount "15" @default.
• W2520278743 countsByYear W25202787432018 @default.
• W2520278743 countsByYear W25202787432019 @default.
• W2520278743 countsByYear W25202787432020 @default.
• W2520278743 countsByYear W25202787432021 @default.
• W2520278743 countsByYear W25202787432022 @default.
• W2520278743 countsByYear W25202787432023 @default.
• W2520278743 crossrefType "journal-article" @default.
• W2520278743 hasAuthorship W2520278743A5013423421 @default.
• W2520278743 hasAuthorship W2520278743A5025185970 @default.
• W2520278743 hasAuthorship W2520278743A5087582416 @default.
• W2520278743 hasBestOaLocation W25202787432 @default.
• W2520278743 hasConcept C113196181 @default.
• W2520278743 hasConcept C127413603 @default.
• W2520278743 hasConcept C137637335 @default.
• W2520278743 hasConcept C159985019 @default.
• W2520278743 hasConcept C171250308 @default.
• W2520278743 hasConcept C175708663 @default.
• W2520278743 hasConcept C185592680 @default.
• W2520278743 hasConcept C19067145 @default.
• W2520278743 hasConcept C191897082 @default.
• W2520278743 hasConcept C192562407 @default.
• W2520278743 hasConcept C2779227376 @default.
• W2520278743 hasConcept C42360764 @default.
• W2520278743 hasConcept C43617362 @default.
• W2520278743 hasConcept C49040817 @default.
• W2520278743 hasConcept C544956773 @default.
• W2520278743 hasConcept C549387045 @default.
• W2520278743 hasConcept C77066764 @default.
• W2520278743 hasConceptScore W2520278743C113196181 @default.
• W2520278743 hasConceptScore W2520278743C127413603 @default.
• W2520278743 hasConceptScore W2520278743C137637335 @default.
• W2520278743 hasConceptScore W2520278743C159985019 @default.
• W2520278743 hasConceptScore W2520278743C171250308 @default.
• W2520278743 hasConceptScore W2520278743C175708663 @default.
• W2520278743 hasConceptScore W2520278743C185592680 @default.
• W2520278743 hasConceptScore W2520278743C19067145 @default.
• W2520278743 hasConceptScore W2520278743C191897082 @default.
• W2520278743 hasConceptScore W2520278743C192562407 @default.
• W2520278743 hasConceptScore W2520278743C2779227376 @default.
• W2520278743 hasConceptScore W2520278743C42360764 @default.
• W2520278743 hasConceptScore W2520278743C43617362 @default.
• W2520278743 hasConceptScore W2520278743C49040817 @default.
• W2520278743 hasConceptScore W2520278743C544956773 @default.
• W2520278743 hasConceptScore W2520278743C549387045 @default.
• W2520278743 hasConceptScore W2520278743C77066764 @default.
• W2520278743 hasFunder F4320320925 @default.
• W2520278743 hasFunder F4320334893 @default.
• W2520278743 hasIssue "11" @default.
• W2520278743 hasLocation W25202787431 @default.
• W2520278743 hasLocation W25202787432 @default.
• W2520278743 hasLocation W25202787433 @default.
• W2520278743 hasOpenAccess W2520278743 @default.
• W2520278743 hasPrimaryLocation W25202787431 @default.
• W2520278743 hasRelatedWork W1978565924 @default.
• W2520278743 hasRelatedWork W1985064754 @default.
• W2520278743 hasRelatedWork W2009562141 @default.
• W2520278743 hasRelatedWork W2010156142 @default.
• W2520278743 hasRelatedWork W2070686132 @default.
• W2520278743 hasRelatedWork W2295090406 @default.
• W2520278743 hasRelatedWork W2520278743 @default.
• W2520278743 hasRelatedWork W2790297317 @default.

• next