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- W2520289370 abstract "Copper diffusion in two types of barrier layers (SiNx and SiCNx) in different conditions was investigated. The Cu depth profiles were examined by Time-of-Flight Secondary Ion Mass Spectrometry (ToF-SIMS). Different distributions of Cu in barrier layer were observed. This study aims to understand the mechanism behind in order to select an appropriate barrier material for various applications." @default.
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- W2520289370 date "2016-07-01" @default.
- W2520289370 modified "2023-09-25" @default.
- W2520289370 title "Study on copper diffusion barrier materials by Time-of-Flight Secondary Ion Mass Spectrometry (ToF-SIMS)" @default.
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- W2520289370 doi "https://doi.org/10.1109/ipfa.2016.7564266" @default.
- W2520289370 hasPublicationYear "2016" @default.
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