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- W2523342275 abstract "RF MEMS switches have been shown to have better performance than their solid state counterparts on account of their low insertion loss and high isolation. Despite their superiority, these switches suffer from several reliability issues which limit their lifetime when compared with p-i-n diodes and GaAs FET switches. One of the major reliability issues is the reduction in lifetime of these switches when switched under hot switching conditions i.e. when a DC voltage or RF signal is applied across the contact while it is switching from an off to on position or vice versa. In this work, contact damage in Ruthenium-on-Ruthenium microcontacts has been investigated under hot switching conditions. Using an AFM based test setup, developed at Northeastern University for the purpose of contact testing, a large number of experiments were performed to observe and understand the mechanisms that lead to microcontact damage and ultimately its failure. The structure used was a clamped-clamped beam structure with a contact bump at its center. A flat topped mating pillar formed the other end of the contact and this pillar was mounted on a piezoactuator whose expansion and contraction, leading to contacts closing and opening, replicated switching cycles." @default.
- W2523342275 created "2016-09-30" @default.
- W2523342275 creator A5075526464 @default.
- W2523342275 date "2021-05-10" @default.
- W2523342275 modified "2023-10-03" @default.
- W2523342275 title "An experimental investigation of hot switching contact damage in RF MEMS switches" @default.
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- W2523342275 doi "https://doi.org/10.17760/d20004845" @default.
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