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- W2524456210 endingPage "116102" @default.
- W2524456210 startingPage "116102" @default.
- W2524456210 abstract "The dependence of ablation rate of an Al alloy on laser beam spot size (10–150 µm) was investigated using an ArF excimer laser operating at a wavelength of 193 nm and pulse width less than 4 ns. Ablation was conducted in air at a fluence of 11 J cm−2 and at a repetition rate of 20 Hz. Surface morphology and depth of craters produced by a variable number of laser pulses were characterized using optical and scanning electron microscopy. Laser ablation inductively coupled plasma mass spectrometry (LA-ICP-MS) was used as an additional diagnostic technique to estimate the amount of material ablated from craters produced by a laser beam of different diameters. Laser beam spot size and number of laser pulses applied to the same spot were found to influence crater morphology, ablation rate, shape and amount of particles deposited at or around the crater rim. Ablation rate was found to be less dependent on spot size for craters greater than 85 µm. A four-fold increase in ablation rate was observed with decreasing crater size from 150 µm to 10 µm." @default.
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- W2524456210 date "2016-09-30" @default.
- W2524456210 modified "2023-10-14" @default.
- W2524456210 title "Excimer laser ablation of aluminum: influence of spot size on ablation rate" @default.
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- W2524456210 doi "https://doi.org/10.1088/1054-660x/26/11/116102" @default.
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