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- W2525357285 abstract "A closed-loop MEMS accelerometer with capacitive sensing interface ASIC (application specific integrated circuit) is presented. The parasitic-insensitive switched-capacitor sample-charge architecture is used to implement the capacitive sensing, which is crucial to the case where sensor and interface ASIC are combined in a two-chip approach to implement the closed-loop MEMS accelerometer. Based on the 0.35mm CMOS sensing interface ASIC, an accelerometer prototype has been implemented, in which force-rebalance with the lag-proportional-integral controller is applied to improve the system stability and frequency response performance, and the testing results indicate the sensitivity of the presented accelerometer is 650 mV/g, the full measurement range � 15 g, the non-linearity 0.098% and the noise floor 23.17mg/rt-Hz." @default.
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- W2525357285 date "2013-01-01" @default.
- W2525357285 modified "2023-09-23" @default.
- W2525357285 title "A closed-loop MEMS accelerometer with capacitive sensing" @default.
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