Matches in SemOpenAlex for { <https://semopenalex.org/work/W2525486548> ?p ?o ?g. }
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- W2525486548 endingPage "312" @default.
- W2525486548 startingPage "309" @default.
- W2525486548 abstract "The ability to predict material removal rates in chemical mechanical planarization (CMP) is an essential ingredient for low cost, high quality IC chips. Recently, models that address the slurry particles have been proposed. We address three such models. The first two differ only in how the number of active particles is computed. Both assume that pad asperities are identical and nonrandom. The third is dynamic in accommodating changing pad properties. For larger mean particle size (diameter), the role of the standard deviation of particle size distribution is uncertain. The dynamic behavior of the third model is compared with experimental observations." @default.
- W2525486548 created "2016-10-07" @default.
- W2525486548 creator A5002687722 @default.
- W2525486548 creator A5029725410 @default.
- W2525486548 creator A5075291409 @default.
- W2525486548 creator A5085424602 @default.
- W2525486548 date "2005-01-01" @default.
- W2525486548 modified "2023-10-01" @default.
- W2525486548 title "Pad Surface Roughness and Slurry Particle Size Distribution Effects on Material Removal Rate in Chemical Mechanical Planarization" @default.
- W2525486548 cites W156119927 @default.
- W2525486548 cites W1976437559 @default.
- W2525486548 cites W2050419199 @default.
- W2525486548 cites W2075398095 @default.
- W2525486548 cites W2082720356 @default.
- W2525486548 cites W2089455109 @default.
- W2525486548 cites W2099278477 @default.
- W2525486548 cites W2103239205 @default.
- W2525486548 cites W2105451852 @default.
- W2525486548 cites W2127767984 @default.
- W2525486548 cites W2163484656 @default.
- W2525486548 doi "https://doi.org/10.1016/s0007-8506(07)60110-3" @default.
- W2525486548 hasPublicationYear "2005" @default.
- W2525486548 type Work @default.
- W2525486548 sameAs 2525486548 @default.
- W2525486548 citedByCount "43" @default.
- W2525486548 countsByYear W25254865482012 @default.
- W2525486548 countsByYear W25254865482013 @default.
- W2525486548 countsByYear W25254865482014 @default.
- W2525486548 countsByYear W25254865482015 @default.
- W2525486548 countsByYear W25254865482016 @default.
- W2525486548 countsByYear W25254865482017 @default.
- W2525486548 countsByYear W25254865482018 @default.
- W2525486548 countsByYear W25254865482019 @default.
- W2525486548 countsByYear W25254865482020 @default.
- W2525486548 countsByYear W25254865482021 @default.
- W2525486548 countsByYear W25254865482022 @default.
- W2525486548 countsByYear W25254865482023 @default.
- W2525486548 crossrefType "journal-article" @default.
- W2525486548 hasAuthorship W2525486548A5002687722 @default.
- W2525486548 hasAuthorship W2525486548A5029725410 @default.
- W2525486548 hasAuthorship W2525486548A5075291409 @default.
- W2525486548 hasAuthorship W2525486548A5085424602 @default.
- W2525486548 hasBestOaLocation W25254865482 @default.
- W2525486548 hasConcept C105795698 @default.
- W2525486548 hasConcept C107365816 @default.
- W2525486548 hasConcept C111368507 @default.
- W2525486548 hasConcept C127313418 @default.
- W2525486548 hasConcept C127413603 @default.
- W2525486548 hasConcept C138113353 @default.
- W2525486548 hasConcept C159985019 @default.
- W2525486548 hasConcept C180088628 @default.
- W2525486548 hasConcept C187530423 @default.
- W2525486548 hasConcept C192562407 @default.
- W2525486548 hasConcept C22679943 @default.
- W2525486548 hasConcept C2778517922 @default.
- W2525486548 hasConcept C33923547 @default.
- W2525486548 hasConcept C42360764 @default.
- W2525486548 hasConcept C60448018 @default.
- W2525486548 hasConcept C71039073 @default.
- W2525486548 hasConcept C94293008 @default.
- W2525486548 hasConceptScore W2525486548C105795698 @default.
- W2525486548 hasConceptScore W2525486548C107365816 @default.
- W2525486548 hasConceptScore W2525486548C111368507 @default.
- W2525486548 hasConceptScore W2525486548C127313418 @default.
- W2525486548 hasConceptScore W2525486548C127413603 @default.
- W2525486548 hasConceptScore W2525486548C138113353 @default.
- W2525486548 hasConceptScore W2525486548C159985019 @default.
- W2525486548 hasConceptScore W2525486548C180088628 @default.
- W2525486548 hasConceptScore W2525486548C187530423 @default.
- W2525486548 hasConceptScore W2525486548C192562407 @default.
- W2525486548 hasConceptScore W2525486548C22679943 @default.
- W2525486548 hasConceptScore W2525486548C2778517922 @default.
- W2525486548 hasConceptScore W2525486548C33923547 @default.
- W2525486548 hasConceptScore W2525486548C42360764 @default.
- W2525486548 hasConceptScore W2525486548C60448018 @default.
- W2525486548 hasConceptScore W2525486548C71039073 @default.
- W2525486548 hasConceptScore W2525486548C94293008 @default.
- W2525486548 hasIssue "1" @default.
- W2525486548 hasLocation W25254865481 @default.
- W2525486548 hasLocation W25254865482 @default.
- W2525486548 hasOpenAccess W2525486548 @default.
- W2525486548 hasPrimaryLocation W25254865481 @default.
- W2525486548 hasRelatedWork W1973054263 @default.
- W2525486548 hasRelatedWork W1974780122 @default.
- W2525486548 hasRelatedWork W2047349890 @default.
- W2525486548 hasRelatedWork W2076501399 @default.
- W2525486548 hasRelatedWork W2086483627 @default.
- W2525486548 hasRelatedWork W2333979735 @default.
- W2525486548 hasRelatedWork W2356978086 @default.
- W2525486548 hasRelatedWork W2364203019 @default.
- W2525486548 hasRelatedWork W3167916481 @default.
- W2525486548 hasRelatedWork W4206236271 @default.
- W2525486548 hasVolume "54" @default.
- W2525486548 isParatext "false" @default.
- W2525486548 isRetracted "false" @default.
- W2525486548 magId "2525486548" @default.
- W2525486548 workType "article" @default.