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• W2526676077 abstract "Industrial interest in micro electro-mechanical systems is rapidly increasing. Due to new processes for manufacturing microactuators and micromotors as e.g. X-ray LIGA, Deep UVLithography and plasma etching the number of possible structures has grown as well as the precision with which they can be manufactured. As the production of such devices is expensive there is an increasing demand for analysing tools that can simulate the operational behaviour of various designs. A technique to calculate the average torque and torque ripple for electrostatic micromotors has been developed. This technique is based on the use of an equivalent circuit model. It is described how to generate the parameters of this equivalent circuit model using finite elements. The same type of equivalent circuit can be used disregarding if the parameters are calculated from 2D or 3D field solutions. The Equivalent Circuit Model The idea of generating an equivalent circuit model for an electrostatic micromotor is, as for any electric motor, to provide the possibility to treat the motor as a circuit component, to integrate the motor in the electric supply circuit, to allow simulations of the dynamic behaviour especially in control systems and to allow prediction of the mechanical properties for a given excitation, e.g. electric torque and rotating speed. The data needed to generate an equivalent circuit model is classically obtained from measurements. However, performing measurements on electrostatic micromotors is very difficult due to the extremely low values of both electrical and mechanical properties. Typical values are capacitances of a few to a few hundred f F (10-15) and torques of a few to a few hundred pNm. Therefore, electrical and mechanical properties must be calculated using e.g. the finite element technique. Since finite element computation is more time consuming than computation using lumped parameters, it is in this case beneficial to calculate intrinsic properties. These are finally used to generate the equivalent circuit model. The equivalent circuit model described here is specially designed to enable calculation of the electric torque as a function of the rotor position for variable capacitance micro motors. The natural choice for the intrinsic properties are hence capacitances. The equivalent circuit model for a motor with 6 stator electrodes is shown in fig. 1. Due to the close link between the physical capacitive coupling between different parts in the motor and the lumped parameters of the equivalent circuit model, this equivalent circuit model provides a good representation of the motor geometry. Each parameter, i.e. each capacitive component is a function of the rotor position α. This makes it possible, using the energy stored in a capacitance and the torque formulation of virtual work, to express the torque as function of the rotor position and thus to calculate the average torque and the torque ripple." @default.
• W2526676077 created "2016-10-07" @default.
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• W2526676077 date "1995-01-01" @default.
• W2526676077 modified "2023-09-27" @default.
• W2526676077 title "Equivalent circuit technique for electrostatic micromotors" @default.
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