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- W2527967791 abstract "In this paper, we studied a novel approach, UV nanoimprint lithography using glucose-based template with gaspermeableand gaseous adsorption for reduction of air-trapping issue. The air-trapping issue in UV nanoimprintlithography resist is a cause of pattern failure in resist or UV curable materials. The results of 180 nm dense linepatterning of UV curable patterning materials containing acetone in UV nanoimprint lithography using glucose-basedtemplate with gas-permeable and gaseous adsorption were effected to reduce the pattern failure as compared with that ofthe poly(dimethylsiloxane) without gas-permeable and gaseous adsorption as the reference. The proposed UVnanoimprint lithography using glucose-based template with gas-permeable and gaseous adsorption is one of the mostpromising processes ready to be investigated for mass-production of photomask applications." @default.
- W2527967791 created "2016-10-14" @default.
- W2527967791 creator A5010432409 @default.
- W2527967791 creator A5012181153 @default.
- W2527967791 creator A5031045924 @default.
- W2527967791 creator A5065563404 @default.
- W2527967791 creator A5082002770 @default.
- W2527967791 date "2016-10-05" @default.
- W2527967791 modified "2023-09-23" @default.
- W2527967791 title "Approach of UV nanoimprint lithography using template with gas-permeable and gaseous adsorption for reduction of air-trapping issue" @default.
- W2527967791 cites W1516122937 @default.
- W2527967791 cites W1983497329 @default.
- W2527967791 cites W1999734004 @default.
- W2527967791 cites W2022945686 @default.
- W2527967791 cites W2029841675 @default.
- W2527967791 cites W2039108581 @default.
- W2527967791 cites W2041403731 @default.
- W2527967791 cites W2055290028 @default.
- W2527967791 cites W2082276308 @default.
- W2527967791 cites W2108436767 @default.
- W2527967791 cites W2132312422 @default.
- W2527967791 cites W2137983853 @default.
- W2527967791 cites W2160685273 @default.
- W2527967791 cites W2337189718 @default.
- W2527967791 cites W4251264148 @default.
- W2527967791 doi "https://doi.org/10.1117/12.2243401" @default.
- W2527967791 hasPublicationYear "2016" @default.
- W2527967791 type Work @default.
- W2527967791 sameAs 2527967791 @default.
- W2527967791 citedByCount "0" @default.
- W2527967791 crossrefType "proceedings-article" @default.
- W2527967791 hasAuthorship W2527967791A5010432409 @default.
- W2527967791 hasAuthorship W2527967791A5012181153 @default.
- W2527967791 hasAuthorship W2527967791A5031045924 @default.
- W2527967791 hasAuthorship W2527967791A5065563404 @default.
- W2527967791 hasAuthorship W2527967791A5082002770 @default.
- W2527967791 hasConcept C127413603 @default.
- W2527967791 hasConcept C136525101 @default.
- W2527967791 hasConcept C142724271 @default.
- W2527967791 hasConcept C150394285 @default.
- W2527967791 hasConcept C171250308 @default.
- W2527967791 hasConcept C178790620 @default.
- W2527967791 hasConcept C185592680 @default.
- W2527967791 hasConcept C192562407 @default.
- W2527967791 hasConcept C204223013 @default.
- W2527967791 hasConcept C204787440 @default.
- W2527967791 hasConcept C2777046567 @default.
- W2527967791 hasConcept C2779227376 @default.
- W2527967791 hasConcept C2781213060 @default.
- W2527967791 hasConcept C42360764 @default.
- W2527967791 hasConcept C49040817 @default.
- W2527967791 hasConcept C53524968 @default.
- W2527967791 hasConcept C71924100 @default.
- W2527967791 hasConceptScore W2527967791C127413603 @default.
- W2527967791 hasConceptScore W2527967791C136525101 @default.
- W2527967791 hasConceptScore W2527967791C142724271 @default.
- W2527967791 hasConceptScore W2527967791C150394285 @default.
- W2527967791 hasConceptScore W2527967791C171250308 @default.
- W2527967791 hasConceptScore W2527967791C178790620 @default.
- W2527967791 hasConceptScore W2527967791C185592680 @default.
- W2527967791 hasConceptScore W2527967791C192562407 @default.
- W2527967791 hasConceptScore W2527967791C204223013 @default.
- W2527967791 hasConceptScore W2527967791C204787440 @default.
- W2527967791 hasConceptScore W2527967791C2777046567 @default.
- W2527967791 hasConceptScore W2527967791C2779227376 @default.
- W2527967791 hasConceptScore W2527967791C2781213060 @default.
- W2527967791 hasConceptScore W2527967791C42360764 @default.
- W2527967791 hasConceptScore W2527967791C49040817 @default.
- W2527967791 hasConceptScore W2527967791C53524968 @default.
- W2527967791 hasConceptScore W2527967791C71924100 @default.
- W2527967791 hasLocation W25279677911 @default.
- W2527967791 hasOpenAccess W2527967791 @default.
- W2527967791 hasPrimaryLocation W25279677911 @default.
- W2527967791 hasRelatedWork W1557223838 @default.
- W2527967791 hasRelatedWork W1999414956 @default.
- W2527967791 hasRelatedWork W2030938525 @default.
- W2527967791 hasRelatedWork W2045361537 @default.
- W2527967791 hasRelatedWork W2132312422 @default.
- W2527967791 hasRelatedWork W2537493329 @default.
- W2527967791 hasRelatedWork W2598216679 @default.
- W2527967791 hasRelatedWork W2600454212 @default.
- W2527967791 hasRelatedWork W2626202081 @default.
- W2527967791 hasRelatedWork W2788061514 @default.
- W2527967791 hasRelatedWork W2790967986 @default.
- W2527967791 hasRelatedWork W2804014632 @default.
- W2527967791 hasRelatedWork W2978783198 @default.
- W2527967791 hasRelatedWork W2989036485 @default.
- W2527967791 hasRelatedWork W606542768 @default.
- W2527967791 hasRelatedWork W2220071855 @default.
- W2527967791 hasRelatedWork W249227381 @default.
- W2527967791 hasRelatedWork W2743019900 @default.
- W2527967791 hasRelatedWork W2773119086 @default.
- W2527967791 hasRelatedWork W2824196953 @default.
- W2527967791 isParatext "false" @default.
- W2527967791 isRetracted "false" @default.
- W2527967791 magId "2527967791" @default.
- W2527967791 workType "article" @default.