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• W2529596191 startingPage "1601753" @default.
• W2529596191 abstract "Silicon is used as a prominent case to demonstrate the dramatic effects of helium ion microscope nanofabrication. Structurally, a submicrometer Si pillar can turn completely amorphous at He+ doses typically used for micromachining, forming nanobubbles at higher doses. In terms of mechanical properties, the flow stress decreases markedly with increasing dosage, and the softened amorphous Si exhibits spread-out plastic flow." @default.
• W2529596191 created "2016-10-14" @default.
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• W2529596191 date "2016-10-06" @default.
• W2529596191 modified "2023-09-30" @default.
• W2529596191 title "Helium Ion Microscope Fabrication Causing Changes in the Structure and Mechanical Behavior of Silicon Micropillars" @default.
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• W2529596191 doi "https://doi.org/10.1002/smll.201601753" @default.
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