Matches in SemOpenAlex for { <https://semopenalex.org/work/W2530790693> ?p ?o ?g. }
Showing items 1 to 98 of
98
with 100 items per page.
- W2530790693 abstract "Application variety and huge potential market of RF MEMS switches guarantee relentless research interest to the field. There are lots of different types of MEMS switches. Direct contact MEMS switches are simplifier for integration than capacitive MEMS switches. Lateral technology considerably simplifies the formation process. The objective of this research is to estimate characteristics of the simple direct-contact lateral MEMS switch and to understand the improvement directions. The MEMS switches were fabricated on the SOI wafers by e-beam lithography, dry etching and wet HF-etching. E-beam lithography and dry etching were used to form the cantilever and electrodes on the buried oxide layer. The structure with two control electrodes was used. IV characteristics were measured by Keithley 4200-SCS. The distance between cantilever and control electrodes was 100 nm. From the obtained IV characteristics it is clear that the devices switches at about 60 V. High control voltage could be explained by the large distance between cantilever and control electrode, and high rigidity of the cantilever. Following simulation in COMSOL Multiphysics showed that the control voltage could be decreased to 20-30 V by adding of spring element to the cantilever and device geometry modification." @default.
- W2530790693 created "2016-10-21" @default.
- W2530790693 creator A5004227652 @default.
- W2530790693 creator A5034918299 @default.
- W2530790693 creator A5045844997 @default.
- W2530790693 creator A5047818276 @default.
- W2530790693 creator A5052543631 @default.
- W2530790693 creator A5053510161 @default.
- W2530790693 creator A5059265449 @default.
- W2530790693 date "2016-12-30" @default.
- W2530790693 modified "2023-09-27" @default.
- W2530790693 title "Silicon ohmic lateral-contact MEMS switch for RF applications" @default.
- W2530790693 cites W1581414230 @default.
- W2530790693 cites W1967726095 @default.
- W2530790693 cites W2069588843 @default.
- W2530790693 doi "https://doi.org/10.1117/12.2267093" @default.
- W2530790693 hasPublicationYear "2016" @default.
- W2530790693 type Work @default.
- W2530790693 sameAs 2530790693 @default.
- W2530790693 citedByCount "1" @default.
- W2530790693 countsByYear W25307906932022 @default.
- W2530790693 crossrefType "proceedings-article" @default.
- W2530790693 hasAuthorship W2530790693A5004227652 @default.
- W2530790693 hasAuthorship W2530790693A5034918299 @default.
- W2530790693 hasAuthorship W2530790693A5045844997 @default.
- W2530790693 hasAuthorship W2530790693A5047818276 @default.
- W2530790693 hasAuthorship W2530790693A5052543631 @default.
- W2530790693 hasAuthorship W2530790693A5053510161 @default.
- W2530790693 hasAuthorship W2530790693A5059265449 @default.
- W2530790693 hasConcept C100460472 @default.
- W2530790693 hasConcept C105487726 @default.
- W2530790693 hasConcept C110339231 @default.
- W2530790693 hasConcept C119599485 @default.
- W2530790693 hasConcept C127413603 @default.
- W2530790693 hasConcept C1291036 @default.
- W2530790693 hasConcept C138230450 @default.
- W2530790693 hasConcept C141354745 @default.
- W2530790693 hasConcept C147789679 @default.
- W2530790693 hasConcept C159985019 @default.
- W2530790693 hasConcept C160671074 @default.
- W2530790693 hasConcept C165801399 @default.
- W2530790693 hasConcept C171250308 @default.
- W2530790693 hasConcept C17525397 @default.
- W2530790693 hasConcept C185592680 @default.
- W2530790693 hasConcept C192562407 @default.
- W2530790693 hasConcept C204223013 @default.
- W2530790693 hasConcept C206755178 @default.
- W2530790693 hasConcept C2779227376 @default.
- W2530790693 hasConcept C37977207 @default.
- W2530790693 hasConcept C49040817 @default.
- W2530790693 hasConceptScore W2530790693C100460472 @default.
- W2530790693 hasConceptScore W2530790693C105487726 @default.
- W2530790693 hasConceptScore W2530790693C110339231 @default.
- W2530790693 hasConceptScore W2530790693C119599485 @default.
- W2530790693 hasConceptScore W2530790693C127413603 @default.
- W2530790693 hasConceptScore W2530790693C1291036 @default.
- W2530790693 hasConceptScore W2530790693C138230450 @default.
- W2530790693 hasConceptScore W2530790693C141354745 @default.
- W2530790693 hasConceptScore W2530790693C147789679 @default.
- W2530790693 hasConceptScore W2530790693C159985019 @default.
- W2530790693 hasConceptScore W2530790693C160671074 @default.
- W2530790693 hasConceptScore W2530790693C165801399 @default.
- W2530790693 hasConceptScore W2530790693C171250308 @default.
- W2530790693 hasConceptScore W2530790693C17525397 @default.
- W2530790693 hasConceptScore W2530790693C185592680 @default.
- W2530790693 hasConceptScore W2530790693C192562407 @default.
- W2530790693 hasConceptScore W2530790693C204223013 @default.
- W2530790693 hasConceptScore W2530790693C206755178 @default.
- W2530790693 hasConceptScore W2530790693C2779227376 @default.
- W2530790693 hasConceptScore W2530790693C37977207 @default.
- W2530790693 hasConceptScore W2530790693C49040817 @default.
- W2530790693 hasLocation W25307906931 @default.
- W2530790693 hasOpenAccess W2530790693 @default.
- W2530790693 hasPrimaryLocation W25307906931 @default.
- W2530790693 hasRelatedWork W1598917330 @default.
- W2530790693 hasRelatedWork W1785774197 @default.
- W2530790693 hasRelatedWork W2025971738 @default.
- W2530790693 hasRelatedWork W2068173905 @default.
- W2530790693 hasRelatedWork W2080951929 @default.
- W2530790693 hasRelatedWork W2082133582 @default.
- W2530790693 hasRelatedWork W2161626085 @default.
- W2530790693 hasRelatedWork W2163387957 @default.
- W2530790693 hasRelatedWork W2288831037 @default.
- W2530790693 hasRelatedWork W2403475928 @default.
- W2530790693 hasRelatedWork W2542449158 @default.
- W2530790693 hasRelatedWork W2797518300 @default.
- W2530790693 hasRelatedWork W2798576376 @default.
- W2530790693 hasRelatedWork W3049509310 @default.
- W2530790693 hasRelatedWork W2110364003 @default.
- W2530790693 hasRelatedWork W2759751135 @default.
- W2530790693 hasRelatedWork W2875564510 @default.
- W2530790693 hasRelatedWork W2934025405 @default.
- W2530790693 hasRelatedWork W3019267965 @default.
- W2530790693 hasRelatedWork W3169008170 @default.
- W2530790693 isParatext "false" @default.
- W2530790693 isRetracted "false" @default.
- W2530790693 magId "2530790693" @default.
- W2530790693 workType "article" @default.