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• W2531139846 abstract "TiN film was coated on the internal surface of a racetrack-type ceramic pipe by three different methods: radio-frequency sputtering, DC sputtering and DC magnetron sputtering. The deposition rates of TiN film under different coating methods were compared. The highest deposition rate was 156 nm/h, which was obtained by magnetron sputtering coating. Based on AFM, SEM and XPS test results, the properties of TiN film, such as film roughness and surface morphology, were analyzed. Furthermore, the deposition rates were studied with two different cathode types, Ti wires and Ti plate. According to the SEM test results, the deposition rate of TiN/Ti film was about 800 nm/h with Ti plate cathode by DC magnetron sputtering. Using Ti plate cathode rather than Ti wire cathode can greatly improve the film deposition rate." @default.
• W2531139846 created "2016-10-21" @default.
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• W2531139846 date "2015-11-01" @default.
• W2531139846 modified "2023-09-24" @default.
• W2531139846 title "Experimental study on TiN coated racetrack-type ceramic pipe" @default.
• W2531139846 cites W2023644125 @default.
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• W2531139846 doi "https://doi.org/10.1088/1674-1137/39/11/117005" @default.
• W2531139846 hasPublicationYear "2015" @default.
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