Matches in SemOpenAlex for { <https://semopenalex.org/work/W2531323118> ?p ?o ?g. }
- W2531323118 endingPage "9" @default.
- W2531323118 startingPage "1" @default.
- W2531323118 abstract "Annealing-insensitive black silicon with high absorption below the silicon bandgap has been achieved by femtosecond laser direct writing. Spike microstructures with sizes ranging from 4 to 25 μm are formed on the surface layer of silicon substrate, and a large amount of phosphorous impurities (10 <sup xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>21</sup> cm <sup xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>-3</sup> ) is doped during the resolidification process. The infrared absorption of phosphorus-doped black silicon decreases slightly with both the annealing temperature and duration. Excitingly, the largest decrease is less than 10% at 2 μm (annealing 240 min at 873K). This thermostable infrared absorption is related to free carrier absorption. After laser irradiation, the phosphorus-doped layer maintains a relatively high crystallinity that can be improved further during thermal annealing. The density of the electrically activated impurities is approximately 10 <sup xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>19</sup> cm <sup xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>-3</sup> ." @default.
- W2531323118 created "2016-10-21" @default.
- W2531323118 creator A5000194814 @default.
- W2531323118 creator A5000681755 @default.
- W2531323118 creator A5020955650 @default.
- W2531323118 creator A5024744708 @default.
- W2531323118 creator A5058110234 @default.
- W2531323118 creator A5065494925 @default.
- W2531323118 date "2016-12-01" @default.
- W2531323118 modified "2023-10-17" @default.
- W2531323118 title "Fabrication of Black Silicon With Thermostable Infrared Absorption by Femtosecond Laser" @default.
- W2531323118 cites W1966664178 @default.
- W2531323118 cites W1968022893 @default.
- W2531323118 cites W1978779246 @default.
- W2531323118 cites W1980984534 @default.
- W2531323118 cites W1992157825 @default.
- W2531323118 cites W1995978450 @default.
- W2531323118 cites W2000418477 @default.
- W2531323118 cites W2001656329 @default.
- W2531323118 cites W2010646735 @default.
- W2531323118 cites W2014768807 @default.
- W2531323118 cites W2026033481 @default.
- W2531323118 cites W2041703212 @default.
- W2531323118 cites W2044042384 @default.
- W2531323118 cites W2048437240 @default.
- W2531323118 cites W2049826633 @default.
- W2531323118 cites W2062051119 @default.
- W2531323118 cites W2063820283 @default.
- W2531323118 cites W2073693708 @default.
- W2531323118 cites W2075814025 @default.
- W2531323118 cites W2076915790 @default.
- W2531323118 cites W2084348130 @default.
- W2531323118 cites W2094093348 @default.
- W2531323118 cites W2096488047 @default.
- W2531323118 cites W2100859102 @default.
- W2531323118 cites W2128648684 @default.
- W2531323118 cites W2163434104 @default.
- W2531323118 doi "https://doi.org/10.1109/jphot.2016.2617403" @default.
- W2531323118 hasPublicationYear "2016" @default.
- W2531323118 type Work @default.
- W2531323118 sameAs 2531323118 @default.
- W2531323118 citedByCount "17" @default.
- W2531323118 countsByYear W25313231182016 @default.
- W2531323118 countsByYear W25313231182017 @default.
- W2531323118 countsByYear W25313231182019 @default.
- W2531323118 countsByYear W25313231182020 @default.
- W2531323118 countsByYear W25313231182021 @default.
- W2531323118 countsByYear W25313231182022 @default.
- W2531323118 countsByYear W25313231182023 @default.
- W2531323118 crossrefType "journal-article" @default.
- W2531323118 hasAuthorship W2531323118A5000194814 @default.
- W2531323118 hasAuthorship W2531323118A5000681755 @default.
- W2531323118 hasAuthorship W2531323118A5020955650 @default.
- W2531323118 hasAuthorship W2531323118A5024744708 @default.
- W2531323118 hasAuthorship W2531323118A5058110234 @default.
- W2531323118 hasAuthorship W2531323118A5065494925 @default.
- W2531323118 hasBestOaLocation W25313231181 @default.
- W2531323118 hasConcept C113196181 @default.
- W2531323118 hasConcept C120665830 @default.
- W2531323118 hasConcept C121332964 @default.
- W2531323118 hasConcept C153642686 @default.
- W2531323118 hasConcept C158355884 @default.
- W2531323118 hasConcept C159985019 @default.
- W2531323118 hasConcept C167735695 @default.
- W2531323118 hasConcept C178790620 @default.
- W2531323118 hasConcept C185592680 @default.
- W2531323118 hasConcept C192562407 @default.
- W2531323118 hasConcept C2777855556 @default.
- W2531323118 hasConcept C2778166601 @default.
- W2531323118 hasConcept C46275449 @default.
- W2531323118 hasConcept C49040817 @default.
- W2531323118 hasConcept C520434653 @default.
- W2531323118 hasConcept C544956773 @default.
- W2531323118 hasConcept C57863236 @default.
- W2531323118 hasConcept C71987851 @default.
- W2531323118 hasConceptScore W2531323118C113196181 @default.
- W2531323118 hasConceptScore W2531323118C120665830 @default.
- W2531323118 hasConceptScore W2531323118C121332964 @default.
- W2531323118 hasConceptScore W2531323118C153642686 @default.
- W2531323118 hasConceptScore W2531323118C158355884 @default.
- W2531323118 hasConceptScore W2531323118C159985019 @default.
- W2531323118 hasConceptScore W2531323118C167735695 @default.
- W2531323118 hasConceptScore W2531323118C178790620 @default.
- W2531323118 hasConceptScore W2531323118C185592680 @default.
- W2531323118 hasConceptScore W2531323118C192562407 @default.
- W2531323118 hasConceptScore W2531323118C2777855556 @default.
- W2531323118 hasConceptScore W2531323118C2778166601 @default.
- W2531323118 hasConceptScore W2531323118C46275449 @default.
- W2531323118 hasConceptScore W2531323118C49040817 @default.
- W2531323118 hasConceptScore W2531323118C520434653 @default.
- W2531323118 hasConceptScore W2531323118C544956773 @default.
- W2531323118 hasConceptScore W2531323118C57863236 @default.
- W2531323118 hasConceptScore W2531323118C71987851 @default.
- W2531323118 hasFunder F4320321001 @default.
- W2531323118 hasIssue "6" @default.
- W2531323118 hasLocation W25313231181 @default.
- W2531323118 hasOpenAccess W2531323118 @default.
- W2531323118 hasPrimaryLocation W25313231181 @default.