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- W2531649794 endingPage "68" @default.
- W2531649794 startingPage "59" @default.
- W2531649794 abstract "Abstract The mechanism of laser-induced backside wet etching (LIBWE) of sapphire substrate with CuSO4 solution is considered as a two-step process. First, it deposits the layer from copper sulfate solution on the backside of sapphire substrate by 1064 nm laser irradiation. Then it is followed by the absorption of deposited layer to laser irradiation, resulting in the etching of the sapphire. Therefore, the material removal of LIBWE is based on laser interaction with multilayer materials (sapphire substrate--deposition layer--liquid solution). A three-dimensional thermal model is established to simulate the material removal during the LIBWE process by considering the material data variations of temperature, enthalpy change and latent heat fusion. The model can predict the groove shape influenced by the laser processing parameters (laser fluence, scanning velocity and scanning pass). The simulation results indicate that the groove depth increases with the decreasing of scanning velocity, the increasing of laser fluence and the scanning pass. The groove width is comparable with the focal beam diameter. Some peaks and valleys occur at the bottom of the groove. A comparison between the modeling and experiment indicates that the groove shape in simulation agrees well with the experiment data at laser pulse energy of 4.3 mJ/pulse, scanning velocity of 15 mm/s and the scanning pass of 4. i.e, the present physical model is effective and feasible." @default.
- W2531649794 created "2016-10-21" @default.
- W2531649794 creator A5002738774 @default.
- W2531649794 creator A5041263918 @default.
- W2531649794 creator A5042137880 @default.
- W2531649794 creator A5045389441 @default.
- W2531649794 creator A5049515944 @default.
- W2531649794 creator A5086311315 @default.
- W2531649794 date "2017-03-01" @default.
- W2531649794 modified "2023-10-16" @default.
- W2531649794 title "Three dimensional material removal model of laser-induced backside wet etching of sapphire substrate with CuSO 4 solutions" @default.
- W2531649794 cites W1964587021 @default.
- W2531649794 cites W1969765325 @default.
- W2531649794 cites W1981947496 @default.
- W2531649794 cites W1984882376 @default.
- W2531649794 cites W1987693225 @default.
- W2531649794 cites W1990268085 @default.
- W2531649794 cites W1992163446 @default.
- W2531649794 cites W2008741094 @default.
- W2531649794 cites W2009354474 @default.
- W2531649794 cites W2022963421 @default.
- W2531649794 cites W2031806056 @default.
- W2531649794 cites W2034208492 @default.
- W2531649794 cites W2034264530 @default.
- W2531649794 cites W2041518478 @default.
- W2531649794 cites W2054058560 @default.
- W2531649794 cites W2087607945 @default.
- W2531649794 cites W2092884100 @default.
- W2531649794 cites W2095192293 @default.
- W2531649794 cites W2102022130 @default.
- W2531649794 cites W2122184005 @default.
- W2531649794 cites W2133856537 @default.
- W2531649794 cites W2320104445 @default.
- W2531649794 doi "https://doi.org/10.1016/j.optlastec.2016.09.031" @default.
- W2531649794 hasPublicationYear "2017" @default.
- W2531649794 type Work @default.
- W2531649794 sameAs 2531649794 @default.
- W2531649794 citedByCount "15" @default.
- W2531649794 countsByYear W25316497942017 @default.
- W2531649794 countsByYear W25316497942018 @default.
- W2531649794 countsByYear W25316497942019 @default.
- W2531649794 countsByYear W25316497942020 @default.
- W2531649794 countsByYear W25316497942021 @default.
- W2531649794 countsByYear W25316497942022 @default.
- W2531649794 crossrefType "journal-article" @default.
- W2531649794 hasAuthorship W2531649794A5002738774 @default.
- W2531649794 hasAuthorship W2531649794A5041263918 @default.
- W2531649794 hasAuthorship W2531649794A5042137880 @default.
- W2531649794 hasAuthorship W2531649794A5045389441 @default.
- W2531649794 hasAuthorship W2531649794A5049515944 @default.
- W2531649794 hasAuthorship W2531649794A5086311315 @default.
- W2531649794 hasConcept C100460472 @default.
- W2531649794 hasConcept C111368507 @default.
- W2531649794 hasConcept C120665830 @default.
- W2531649794 hasConcept C121332964 @default.
- W2531649794 hasConcept C127313418 @default.
- W2531649794 hasConcept C1291036 @default.
- W2531649794 hasConcept C159985019 @default.
- W2531649794 hasConcept C192562407 @default.
- W2531649794 hasConcept C2777289219 @default.
- W2531649794 hasConcept C2779227376 @default.
- W2531649794 hasConcept C2780064504 @default.
- W2531649794 hasConcept C49040817 @default.
- W2531649794 hasConcept C520434653 @default.
- W2531649794 hasConceptScore W2531649794C100460472 @default.
- W2531649794 hasConceptScore W2531649794C111368507 @default.
- W2531649794 hasConceptScore W2531649794C120665830 @default.
- W2531649794 hasConceptScore W2531649794C121332964 @default.
- W2531649794 hasConceptScore W2531649794C127313418 @default.
- W2531649794 hasConceptScore W2531649794C1291036 @default.
- W2531649794 hasConceptScore W2531649794C159985019 @default.
- W2531649794 hasConceptScore W2531649794C192562407 @default.
- W2531649794 hasConceptScore W2531649794C2777289219 @default.
- W2531649794 hasConceptScore W2531649794C2779227376 @default.
- W2531649794 hasConceptScore W2531649794C2780064504 @default.
- W2531649794 hasConceptScore W2531649794C49040817 @default.
- W2531649794 hasConceptScore W2531649794C520434653 @default.
- W2531649794 hasFunder F4320321001 @default.
- W2531649794 hasFunder F4320321921 @default.
- W2531649794 hasLocation W25316497941 @default.
- W2531649794 hasOpenAccess W2531649794 @default.
- W2531649794 hasPrimaryLocation W25316497941 @default.
- W2531649794 hasRelatedWork W1517007430 @default.
- W2531649794 hasRelatedWork W1997745362 @default.
- W2531649794 hasRelatedWork W1998248655 @default.
- W2531649794 hasRelatedWork W2016181266 @default.
- W2531649794 hasRelatedWork W2036386554 @default.
- W2531649794 hasRelatedWork W2081818992 @default.
- W2531649794 hasRelatedWork W2119957706 @default.
- W2531649794 hasRelatedWork W2138128960 @default.
- W2531649794 hasRelatedWork W2333497146 @default.
- W2531649794 hasRelatedWork W4254563050 @default.
- W2531649794 hasVolume "89" @default.
- W2531649794 isParatext "false" @default.
- W2531649794 isRetracted "false" @default.
- W2531649794 magId "2531649794" @default.
- W2531649794 workType "article" @default.