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- W2532063485 abstract "The integrated circuits photo masks diagnostics in the automated optical inspection system is developed. This low error probability system based in application of hyperbolic wavelet transforming and photo masks fiducial geometric moment features. The experimental results proved the high noise stability property, which allows reducing lighting apparatus and high precision mechanism conditions." @default.
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- W2532063485 date "2008-02-01" @default.
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- W2532063485 title "Photomasks diagnostic in the automated optical inspection system" @default.
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