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• W2532098613 abstract "This paper presents an overview of optical MEMS technology - processing, devices and reliability issues, for telecommunication applications. Common MEMS processing techniques such as surface micromachining, bulk micromachining and wafer/chip bonding are first outlined, with details and examples. For optical network infrastructure, MEMS for optical cross connects, gain equalizers, add-drop multiplexers, WDM/DWDM switches and others are highlighted. Finally, significant knowledge has been gained on MEMS failure modes, and they are presented. Such knowledge and design/processing guidelines are fundamentally critical to improvements of device lifetime and environmental robustness, which hold the key to the ultimate success of MEMS product commercialization." @default.
• W2532098613 created "2016-10-28" @default.
• W2532098613 creator A5016035354 @default.
• W2532098613 date "2005-06-07" @default.
• W2532098613 modified "2023-09-23" @default.
• W2532098613 title "Optical MEMS technology for telecommunication" @default.
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• W2532098613 doi "https://doi.org/10.1109/icsict.2004.1435228" @default.
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