FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2532100070> ?p ?o ?g. }

• W2532100070 abstract "Physical, electrical and reliability characteristics of ultra thin HfO/sub 2/ as an alternative gate dielectric were studied for the first time. Crucial process parameters of oxygen modulated dc magnetron sputtering were optimized to achieve an equivalent oxide thickness (EOT) of 11.5 /spl Aring/ without deducting the quantum mechanical effect. Leakage current was 3/spl times/10/sup -2/ A/cm/sup 2/ at +1 V. Excellent dielectric properties such as high dielectric constant, low leakage current, good thermal stability, negligible dispersion and good reliability were demonstrated." @default.
• W2532100070 created "2016-10-28" @default.
• W2532100070 creator A5022186934 @default.
• W2532100070 creator A5025337998 @default.
• W2532100070 creator A5028191067 @default.
• W2532100070 creator A5054809779 @default.
• W2532100070 creator A5061695414 @default.
• W2532100070 creator A5081078466 @default.
• W2532100070 creator A5091190760 @default.
• W2532100070 date "2003-01-22" @default.
• W2532100070 modified "2023-10-18" @default.
• W2532100070 title "Ultrathin hafnium oxide with low leakage and excellent reliability for alternative gate dielectric application" @default.
• W2532100070 cites W1563052324 @default.
• W2532100070 cites W1642793491 @default.
• W2532100070 cites W1970200102 @default.
• W2532100070 cites W2002904152 @default.
• W2532100070 cites W2025099317 @default.
• W2532100070 cites W2036236387 @default.
• W2532100070 cites W2101781928 @default.
• W2532100070 cites W2131965942 @default.
• W2532100070 doi "https://doi.org/10.1109/iedm.1999.823863" @default.
• W2532100070 hasPublicationYear "2003" @default.
• W2532100070 type Work @default.
• W2532100070 sameAs 2532100070 @default.
• W2532100070 citedByCount "64" @default.
• W2532100070 countsByYear W25321000702012 @default.
• W2532100070 countsByYear W25321000702013 @default.
• W2532100070 countsByYear W25321000702014 @default.
• W2532100070 countsByYear W25321000702016 @default.
• W2532100070 countsByYear W25321000702017 @default.
• W2532100070 countsByYear W25321000702018 @default.
• W2532100070 countsByYear W25321000702019 @default.
• W2532100070 countsByYear W25321000702020 @default.
• W2532100070 countsByYear W25321000702021 @default.
• W2532100070 countsByYear W25321000702022 @default.
• W2532100070 countsByYear W25321000702023 @default.
• W2532100070 crossrefType "proceedings-article" @default.
• W2532100070 hasAuthorship W2532100070A5022186934 @default.
• W2532100070 hasAuthorship W2532100070A5025337998 @default.
• W2532100070 hasAuthorship W2532100070A5028191067 @default.
• W2532100070 hasAuthorship W2532100070A5054809779 @default.
• W2532100070 hasAuthorship W2532100070A5061695414 @default.
• W2532100070 hasAuthorship W2532100070A5081078466 @default.
• W2532100070 hasAuthorship W2532100070A5091190760 @default.
• W2532100070 hasConcept C119599485 @default.
• W2532100070 hasConcept C121332964 @default.
• W2532100070 hasConcept C127413603 @default.
• W2532100070 hasConcept C133386390 @default.
• W2532100070 hasConcept C139719470 @default.
• W2532100070 hasConcept C162324750 @default.
• W2532100070 hasConcept C16317505 @default.
• W2532100070 hasConcept C163258240 @default.
• W2532100070 hasConcept C165801399 @default.
• W2532100070 hasConcept C166972891 @default.
• W2532100070 hasConcept C171250308 @default.
• W2532100070 hasConcept C172385210 @default.
• W2532100070 hasConcept C178790620 @default.
• W2532100070 hasConcept C185592680 @default.
• W2532100070 hasConcept C19067145 @default.
• W2532100070 hasConcept C191897082 @default.
• W2532100070 hasConcept C192562407 @default.
• W2532100070 hasConcept C22423302 @default.
• W2532100070 hasConcept C2361726 @default.
• W2532100070 hasConcept C24326235 @default.
• W2532100070 hasConcept C2777042071 @default.
• W2532100070 hasConcept C2779851234 @default.
• W2532100070 hasConcept C43214815 @default.
• W2532100070 hasConcept C49040817 @default.
• W2532100070 hasConcept C52780932 @default.
• W2532100070 hasConcept C534791751 @default.
• W2532100070 hasConcept C546638069 @default.
• W2532100070 hasConcept C59061564 @default.
• W2532100070 hasConcept C61427134 @default.
• W2532100070 hasConcept C62520636 @default.
• W2532100070 hasConceptScore W2532100070C119599485 @default.
• W2532100070 hasConceptScore W2532100070C121332964 @default.
• W2532100070 hasConceptScore W2532100070C127413603 @default.
• W2532100070 hasConceptScore W2532100070C133386390 @default.
• W2532100070 hasConceptScore W2532100070C139719470 @default.
• W2532100070 hasConceptScore W2532100070C162324750 @default.
• W2532100070 hasConceptScore W2532100070C16317505 @default.
• W2532100070 hasConceptScore W2532100070C163258240 @default.
• W2532100070 hasConceptScore W2532100070C165801399 @default.
• W2532100070 hasConceptScore W2532100070C166972891 @default.
• W2532100070 hasConceptScore W2532100070C171250308 @default.
• W2532100070 hasConceptScore W2532100070C172385210 @default.
• W2532100070 hasConceptScore W2532100070C178790620 @default.
• W2532100070 hasConceptScore W2532100070C185592680 @default.
• W2532100070 hasConceptScore W2532100070C19067145 @default.
• W2532100070 hasConceptScore W2532100070C191897082 @default.
• W2532100070 hasConceptScore W2532100070C192562407 @default.
• W2532100070 hasConceptScore W2532100070C22423302 @default.
• W2532100070 hasConceptScore W2532100070C2361726 @default.
• W2532100070 hasConceptScore W2532100070C24326235 @default.
• W2532100070 hasConceptScore W2532100070C2777042071 @default.
• W2532100070 hasConceptScore W2532100070C2779851234 @default.
• W2532100070 hasConceptScore W2532100070C43214815 @default.
• W2532100070 hasConceptScore W2532100070C49040817 @default.
• W2532100070 hasConceptScore W2532100070C52780932 @default.
• W2532100070 hasConceptScore W2532100070C534791751 @default.

• next