Matches in SemOpenAlex for { <https://semopenalex.org/work/W2532949116> ?p ?o ?g. }
Showing items 1 to 89 of
89
with 100 items per page.
- W2532949116 abstract "In this work we present a new vertical approach for solving the tradeoff between breakdown capability and on state resistance for PowerMOS devices. We use a vertical transistor on an epitaxial layer. This concept allows the adjustment of the breakdown voltage due to the thickness of the epi-layer separately from the on-state resistance, which is defined by the vertical transistor. The transistor was fabricated by means of atomic layer deposition, which allows very small channel length and doping control on atomistic scale. Devices with breakdown voltages between 12 V and 40 V were fabricated. It is also shown that local channel doping (/spl delta/-doping) instead of homogenous doping in the switching transistor reduces the on state resistance of the device significantly." @default.
- W2532949116 created "2016-10-28" @default.
- W2532949116 creator A5006775530 @default.
- W2532949116 creator A5007167894 @default.
- W2532949116 creator A5022500899 @default.
- W2532949116 creator A5027528905 @default.
- W2532949116 creator A5069983102 @default.
- W2532949116 creator A5080290215 @default.
- W2532949116 date "2002-11-11" @default.
- W2532949116 modified "2023-10-09" @default.
- W2532949116 title "Vertical power-MOSFETs with local channel doping" @default.
- W2532949116 cites W1576157531 @default.
- W2532949116 cites W2010089854 @default.
- W2532949116 cites W2015601653 @default.
- W2532949116 cites W2018420008 @default.
- W2532949116 cites W2150152086 @default.
- W2532949116 cites W2533128293 @default.
- W2532949116 doi "https://doi.org/10.1109/iedm.2000.904261" @default.
- W2532949116 hasPublicationYear "2002" @default.
- W2532949116 type Work @default.
- W2532949116 sameAs 2532949116 @default.
- W2532949116 citedByCount "7" @default.
- W2532949116 countsByYear W25329491162017 @default.
- W2532949116 crossrefType "proceedings-article" @default.
- W2532949116 hasAuthorship W2532949116A5006775530 @default.
- W2532949116 hasAuthorship W2532949116A5007167894 @default.
- W2532949116 hasAuthorship W2532949116A5022500899 @default.
- W2532949116 hasAuthorship W2532949116A5027528905 @default.
- W2532949116 hasAuthorship W2532949116A5069983102 @default.
- W2532949116 hasAuthorship W2532949116A5080290215 @default.
- W2532949116 hasConcept C110738630 @default.
- W2532949116 hasConcept C119321828 @default.
- W2532949116 hasConcept C119599485 @default.
- W2532949116 hasConcept C127413603 @default.
- W2532949116 hasConcept C129014197 @default.
- W2532949116 hasConcept C145598152 @default.
- W2532949116 hasConcept C158470141 @default.
- W2532949116 hasConcept C165801399 @default.
- W2532949116 hasConcept C171250308 @default.
- W2532949116 hasConcept C172385210 @default.
- W2532949116 hasConcept C192562407 @default.
- W2532949116 hasConcept C2778413303 @default.
- W2532949116 hasConcept C2779227376 @default.
- W2532949116 hasConcept C49040817 @default.
- W2532949116 hasConcept C57863236 @default.
- W2532949116 hasConcept C88653102 @default.
- W2532949116 hasConceptScore W2532949116C110738630 @default.
- W2532949116 hasConceptScore W2532949116C119321828 @default.
- W2532949116 hasConceptScore W2532949116C119599485 @default.
- W2532949116 hasConceptScore W2532949116C127413603 @default.
- W2532949116 hasConceptScore W2532949116C129014197 @default.
- W2532949116 hasConceptScore W2532949116C145598152 @default.
- W2532949116 hasConceptScore W2532949116C158470141 @default.
- W2532949116 hasConceptScore W2532949116C165801399 @default.
- W2532949116 hasConceptScore W2532949116C171250308 @default.
- W2532949116 hasConceptScore W2532949116C172385210 @default.
- W2532949116 hasConceptScore W2532949116C192562407 @default.
- W2532949116 hasConceptScore W2532949116C2778413303 @default.
- W2532949116 hasConceptScore W2532949116C2779227376 @default.
- W2532949116 hasConceptScore W2532949116C49040817 @default.
- W2532949116 hasConceptScore W2532949116C57863236 @default.
- W2532949116 hasConceptScore W2532949116C88653102 @default.
- W2532949116 hasLocation W25329491161 @default.
- W2532949116 hasOpenAccess W2532949116 @default.
- W2532949116 hasPrimaryLocation W25329491161 @default.
- W2532949116 hasRelatedWork W1543119659 @default.
- W2532949116 hasRelatedWork W1605799167 @default.
- W2532949116 hasRelatedWork W1608135922 @default.
- W2532949116 hasRelatedWork W1625367297 @default.
- W2532949116 hasRelatedWork W1979784538 @default.
- W2532949116 hasRelatedWork W2015488092 @default.
- W2532949116 hasRelatedWork W2020600619 @default.
- W2532949116 hasRelatedWork W2058912530 @default.
- W2532949116 hasRelatedWork W2059318935 @default.
- W2532949116 hasRelatedWork W2066016076 @default.
- W2532949116 hasRelatedWork W2071671328 @default.
- W2532949116 hasRelatedWork W2072384679 @default.
- W2532949116 hasRelatedWork W2106070726 @default.
- W2532949116 hasRelatedWork W2132921528 @default.
- W2532949116 hasRelatedWork W2133282542 @default.
- W2532949116 hasRelatedWork W2278230552 @default.
- W2532949116 hasRelatedWork W2544105687 @default.
- W2532949116 hasRelatedWork W2573471282 @default.
- W2532949116 hasRelatedWork W3102005610 @default.
- W2532949116 hasRelatedWork W3149887818 @default.
- W2532949116 isParatext "false" @default.
- W2532949116 isRetracted "false" @default.
- W2532949116 magId "2532949116" @default.
- W2532949116 workType "article" @default.