Matches in SemOpenAlex for { <https://semopenalex.org/work/W2532953749> ?p ?o ?g. }
Showing items 1 to 100 of
100
with 100 items per page.
- W2532953749 abstract "Summary form only given. In this paper, a low temperature, atmospheric pressure plasma source has been examined for the isotropic etching of photoresist, glass and metal film. In addition, the system has been configured for remote plasma enhanced chemical vapour deposition of silicon dioxide, silicon nitride and amorphous hydrogenated silicon." @default.
- W2532953749 created "2016-10-28" @default.
- W2532953749 creator A5002110077 @default.
- W2532953749 creator A5021318565 @default.
- W2532953749 creator A5053135559 @default.
- W2532953749 creator A5066858153 @default.
- W2532953749 creator A5072870426 @default.
- W2532953749 date "2004-05-06" @default.
- W2532953749 modified "2023-09-25" @default.
- W2532953749 title "Low temperature, atmospheric pressure plasma processing of materials" @default.
- W2532953749 doi "https://doi.org/10.1109/imnc.2003.1268508" @default.
- W2532953749 hasPublicationYear "2004" @default.
- W2532953749 type Work @default.
- W2532953749 sameAs 2532953749 @default.
- W2532953749 citedByCount "0" @default.
- W2532953749 crossrefType "proceedings-article" @default.
- W2532953749 hasAuthorship W2532953749A5002110077 @default.
- W2532953749 hasAuthorship W2532953749A5021318565 @default.
- W2532953749 hasAuthorship W2532953749A5053135559 @default.
- W2532953749 hasAuthorship W2532953749A5066858153 @default.
- W2532953749 hasAuthorship W2532953749A5072870426 @default.
- W2532953749 hasConcept C100460472 @default.
- W2532953749 hasConcept C107187091 @default.
- W2532953749 hasConcept C121332964 @default.
- W2532953749 hasConcept C1291036 @default.
- W2532953749 hasConcept C134406635 @default.
- W2532953749 hasConcept C145738678 @default.
- W2532953749 hasConcept C153294291 @default.
- W2532953749 hasConcept C171250308 @default.
- W2532953749 hasConcept C185592680 @default.
- W2532953749 hasConcept C192562407 @default.
- W2532953749 hasConcept C200239111 @default.
- W2532953749 hasConcept C2776390347 @default.
- W2532953749 hasConcept C2777431650 @default.
- W2532953749 hasConcept C2779227376 @default.
- W2532953749 hasConcept C2779667780 @default.
- W2532953749 hasConcept C2780740191 @default.
- W2532953749 hasConcept C38347018 @default.
- W2532953749 hasConcept C49040817 @default.
- W2532953749 hasConcept C544956773 @default.
- W2532953749 hasConcept C56052488 @default.
- W2532953749 hasConcept C57410435 @default.
- W2532953749 hasConcept C60581705 @default.
- W2532953749 hasConcept C62520636 @default.
- W2532953749 hasConcept C8010536 @default.
- W2532953749 hasConcept C82706917 @default.
- W2532953749 hasConcept C85344455 @default.
- W2532953749 hasConceptScore W2532953749C100460472 @default.
- W2532953749 hasConceptScore W2532953749C107187091 @default.
- W2532953749 hasConceptScore W2532953749C121332964 @default.
- W2532953749 hasConceptScore W2532953749C1291036 @default.
- W2532953749 hasConceptScore W2532953749C134406635 @default.
- W2532953749 hasConceptScore W2532953749C145738678 @default.
- W2532953749 hasConceptScore W2532953749C153294291 @default.
- W2532953749 hasConceptScore W2532953749C171250308 @default.
- W2532953749 hasConceptScore W2532953749C185592680 @default.
- W2532953749 hasConceptScore W2532953749C192562407 @default.
- W2532953749 hasConceptScore W2532953749C200239111 @default.
- W2532953749 hasConceptScore W2532953749C2776390347 @default.
- W2532953749 hasConceptScore W2532953749C2777431650 @default.
- W2532953749 hasConceptScore W2532953749C2779227376 @default.
- W2532953749 hasConceptScore W2532953749C2779667780 @default.
- W2532953749 hasConceptScore W2532953749C2780740191 @default.
- W2532953749 hasConceptScore W2532953749C38347018 @default.
- W2532953749 hasConceptScore W2532953749C49040817 @default.
- W2532953749 hasConceptScore W2532953749C544956773 @default.
- W2532953749 hasConceptScore W2532953749C56052488 @default.
- W2532953749 hasConceptScore W2532953749C57410435 @default.
- W2532953749 hasConceptScore W2532953749C60581705 @default.
- W2532953749 hasConceptScore W2532953749C62520636 @default.
- W2532953749 hasConceptScore W2532953749C8010536 @default.
- W2532953749 hasConceptScore W2532953749C82706917 @default.
- W2532953749 hasConceptScore W2532953749C85344455 @default.
- W2532953749 hasLocation W25329537491 @default.
- W2532953749 hasOpenAccess W2532953749 @default.
- W2532953749 hasPrimaryLocation W25329537491 @default.
- W2532953749 hasRelatedWork W1968347199 @default.
- W2532953749 hasRelatedWork W1998024038 @default.
- W2532953749 hasRelatedWork W2016643704 @default.
- W2532953749 hasRelatedWork W2020367939 @default.
- W2532953749 hasRelatedWork W2022301514 @default.
- W2532953749 hasRelatedWork W2046619818 @default.
- W2532953749 hasRelatedWork W2048661338 @default.
- W2532953749 hasRelatedWork W2108151680 @default.
- W2532953749 hasRelatedWork W2126218622 @default.
- W2532953749 hasRelatedWork W2168316111 @default.
- W2532953749 hasRelatedWork W2312754417 @default.
- W2532953749 hasRelatedWork W2321276077 @default.
- W2532953749 hasRelatedWork W2740848611 @default.
- W2532953749 hasRelatedWork W2788131428 @default.
- W2532953749 hasRelatedWork W2952827115 @default.
- W2532953749 hasRelatedWork W3143171802 @default.
- W2532953749 hasRelatedWork W3143930490 @default.
- W2532953749 hasRelatedWork W2818545551 @default.
- W2532953749 hasRelatedWork W3019540186 @default.
- W2532953749 hasRelatedWork W3023460288 @default.
- W2532953749 isParatext "false" @default.
- W2532953749 isRetracted "false" @default.
- W2532953749 magId "2532953749" @default.
- W2532953749 workType "article" @default.