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- W2533673669 abstract "The authors describe a fully symmetric 7 mask CMOS technology, utilizing a room-temperature liquid phase oxide deposition technique which has selectivity against photo resist. They have developed process modules for self-aligned well and one mask LDD (lightly doped drain) formation which achieve excellent device performance. The main features of this CMOS technology are (1) very short processing time: (7 masks to first metallization); (2) self-aligned twin retrograde wells with 40% reduction of p/sup +/-n/sup +/ spacing; and (3) optimal LDD design using different-width side-wall spacers for n- and p-channel MOSFETs with a 10% larger on current for p-channel MOSFETs. >" @default.
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- W2533673669 date "2002-12-09" @default.
- W2533673669 modified "2023-09-26" @default.
- W2533673669 title "A 7 mask CMOS-technology utilizing liquid phase selective oxide deposition" @default.
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- W2533673669 doi "https://doi.org/10.1109/iedm.1991.235391" @default.
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