Matches in SemOpenAlex for { <https://semopenalex.org/work/W2533999205> ?p ?o ?g. }
Showing items 1 to 62 of
62
with 100 items per page.
- W2533999205 abstract "In a surface micromachined cantilever, the gap (g), beam thickness (t) and width get modified during fabrication. Since performance of sensors and actuators strongly depend on the final geometry, it becomes essential that these parameters are measured. Two sets of oxide anchored cantilever beams of different lengths with 20 and 30 mum widths are realised. On the released beams resonance frequency (fi) measurements are performed. For a given length, by finding the ratio between measured frequencies for two widths, we get the value of undercut. Using this value in the slope of a fi 2 versus L-4 plot we get the Young's modulus (E) of beam material." @default.
- W2533999205 created "2016-10-28" @default.
- W2533999205 creator A5016502376 @default.
- W2533999205 creator A5060448117 @default.
- W2533999205 date "2007-12-01" @default.
- W2533999205 modified "2023-10-05" @default.
- W2533999205 title "Electrical measurement of undercut in surface micromachined structures" @default.
- W2533999205 cites W1854045440 @default.
- W2533999205 cites W1964225422 @default.
- W2533999205 cites W2116357047 @default.
- W2533999205 cites W2135930749 @default.
- W2533999205 cites W2154183381 @default.
- W2533999205 cites W2161535888 @default.
- W2533999205 cites W2164987771 @default.
- W2533999205 cites W2438493694 @default.
- W2533999205 doi "https://doi.org/10.1109/iwpsd.2007.4472617" @default.
- W2533999205 hasPublicationYear "2007" @default.
- W2533999205 type Work @default.
- W2533999205 sameAs 2533999205 @default.
- W2533999205 citedByCount "0" @default.
- W2533999205 crossrefType "proceedings-article" @default.
- W2533999205 hasAuthorship W2533999205A5016502376 @default.
- W2533999205 hasAuthorship W2533999205A5060448117 @default.
- W2533999205 hasConcept C136525101 @default.
- W2533999205 hasConcept C142724271 @default.
- W2533999205 hasConcept C145667562 @default.
- W2533999205 hasConcept C159985019 @default.
- W2533999205 hasConcept C192562407 @default.
- W2533999205 hasConcept C204787440 @default.
- W2533999205 hasConcept C2524010 @default.
- W2533999205 hasConcept C2776799497 @default.
- W2533999205 hasConcept C2779292183 @default.
- W2533999205 hasConcept C33923547 @default.
- W2533999205 hasConcept C71924100 @default.
- W2533999205 hasConceptScore W2533999205C136525101 @default.
- W2533999205 hasConceptScore W2533999205C142724271 @default.
- W2533999205 hasConceptScore W2533999205C145667562 @default.
- W2533999205 hasConceptScore W2533999205C159985019 @default.
- W2533999205 hasConceptScore W2533999205C192562407 @default.
- W2533999205 hasConceptScore W2533999205C204787440 @default.
- W2533999205 hasConceptScore W2533999205C2524010 @default.
- W2533999205 hasConceptScore W2533999205C2776799497 @default.
- W2533999205 hasConceptScore W2533999205C2779292183 @default.
- W2533999205 hasConceptScore W2533999205C33923547 @default.
- W2533999205 hasConceptScore W2533999205C71924100 @default.
- W2533999205 hasLocation W25339992051 @default.
- W2533999205 hasOpenAccess W2533999205 @default.
- W2533999205 hasPrimaryLocation W25339992051 @default.
- W2533999205 hasRelatedWork W1966635890 @default.
- W2533999205 hasRelatedWork W1975827943 @default.
- W2533999205 hasRelatedWork W2012800575 @default.
- W2533999205 hasRelatedWork W2082964255 @default.
- W2533999205 hasRelatedWork W2129582055 @default.
- W2533999205 hasRelatedWork W2196916080 @default.
- W2533999205 hasRelatedWork W2348774945 @default.
- W2533999205 hasRelatedWork W2899084033 @default.
- W2533999205 hasRelatedWork W4317932927 @default.
- W2533999205 hasRelatedWork W4367603432 @default.
- W2533999205 isParatext "false" @default.
- W2533999205 isRetracted "false" @default.
- W2533999205 magId "2533999205" @default.
- W2533999205 workType "article" @default.