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- W2534331327 abstract "This paper describe an integration solution to achieve automatic manufacturing in the photolithography area of ProMOS's 300 mm fabrication facilities. An automation integration system framework that unifies automation system, photolithography systems and production control mechanisms, is developed to fulfill the factory level of mechanical automation dispatching in the 300 mm Fab, leading to continuous and uninterrupted processing. The pervasive use of automatic manufacturing direct operating costs, factory efficiency, simplifies production control, and caters internal/external customer demands." @default.
- W2534331327 created "2016-10-28" @default.
- W2534331327 creator A5026045497 @default.
- W2534331327 creator A5026501819 @default.
- W2534331327 creator A5045923259 @default.
- W2534331327 creator A5049127088 @default.
- W2534331327 creator A5073758935 @default.
- W2534331327 creator A5087673222 @default.
- W2534331327 date "2007-01-01" @default.
- W2534331327 modified "2023-10-05" @default.
- W2534331327 title "An integrated photolithography system framework for automatic manufacturing in mass production 300mm Fab" @default.
- W2534331327 cites W2117850674 @default.
- W2534331327 cites W2158486846 @default.
- W2534331327 doi "https://doi.org/10.1109/issm.2007.4446801" @default.
- W2534331327 hasPublicationYear "2007" @default.
- W2534331327 type Work @default.
- W2534331327 sameAs 2534331327 @default.
- W2534331327 citedByCount "1" @default.
- W2534331327 countsByYear W25343313272014 @default.
- W2534331327 crossrefType "proceedings-article" @default.
- W2534331327 hasAuthorship W2534331327A5026045497 @default.
- W2534331327 hasAuthorship W2534331327A5026501819 @default.
- W2534331327 hasAuthorship W2534331327A5045923259 @default.
- W2534331327 hasAuthorship W2534331327A5049127088 @default.
- W2534331327 hasAuthorship W2534331327A5073758935 @default.
- W2534331327 hasAuthorship W2534331327A5087673222 @default.
- W2534331327 hasConcept C105487726 @default.
- W2534331327 hasConcept C115901376 @default.
- W2534331327 hasConcept C117671659 @default.
- W2534331327 hasConcept C127413603 @default.
- W2534331327 hasConcept C139719470 @default.
- W2534331327 hasConcept C149635348 @default.
- W2534331327 hasConcept C162324750 @default.
- W2534331327 hasConcept C171250308 @default.
- W2534331327 hasConcept C192562407 @default.
- W2534331327 hasConcept C19527686 @default.
- W2534331327 hasConcept C199360897 @default.
- W2534331327 hasConcept C201995342 @default.
- W2534331327 hasConcept C2778348673 @default.
- W2534331327 hasConcept C40149104 @default.
- W2534331327 hasConcept C41008148 @default.
- W2534331327 hasConcept C53688548 @default.
- W2534331327 hasConcept C77088390 @default.
- W2534331327 hasConcept C78519656 @default.
- W2534331327 hasConceptScore W2534331327C105487726 @default.
- W2534331327 hasConceptScore W2534331327C115901376 @default.
- W2534331327 hasConceptScore W2534331327C117671659 @default.
- W2534331327 hasConceptScore W2534331327C127413603 @default.
- W2534331327 hasConceptScore W2534331327C139719470 @default.
- W2534331327 hasConceptScore W2534331327C149635348 @default.
- W2534331327 hasConceptScore W2534331327C162324750 @default.
- W2534331327 hasConceptScore W2534331327C171250308 @default.
- W2534331327 hasConceptScore W2534331327C192562407 @default.
- W2534331327 hasConceptScore W2534331327C19527686 @default.
- W2534331327 hasConceptScore W2534331327C199360897 @default.
- W2534331327 hasConceptScore W2534331327C201995342 @default.
- W2534331327 hasConceptScore W2534331327C2778348673 @default.
- W2534331327 hasConceptScore W2534331327C40149104 @default.
- W2534331327 hasConceptScore W2534331327C41008148 @default.
- W2534331327 hasConceptScore W2534331327C53688548 @default.
- W2534331327 hasConceptScore W2534331327C77088390 @default.
- W2534331327 hasConceptScore W2534331327C78519656 @default.
- W2534331327 hasLocation W25343313271 @default.
- W2534331327 hasOpenAccess W2534331327 @default.
- W2534331327 hasPrimaryLocation W25343313271 @default.
- W2534331327 hasRelatedWork W1965096282 @default.
- W2534331327 hasRelatedWork W1997915195 @default.
- W2534331327 hasRelatedWork W2079834086 @default.
- W2534331327 hasRelatedWork W2146421951 @default.
- W2534331327 hasRelatedWork W2149188425 @default.
- W2534331327 hasRelatedWork W2534331327 @default.
- W2534331327 hasRelatedWork W2724479145 @default.
- W2534331327 hasRelatedWork W2732457698 @default.
- W2534331327 hasRelatedWork W2734254788 @default.
- W2534331327 hasRelatedWork W4235574864 @default.
- W2534331327 isParatext "false" @default.
- W2534331327 isRetracted "false" @default.
- W2534331327 magId "2534331327" @default.
- W2534331327 workType "article" @default.