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- W2534469596 abstract "A combinatorial deposition technique is developed to fabricate integrated narrow bandpass filters (NBPFs) on a single substrate. It is highly efficient for the fabrication of integrated filter arrays in optical regions. An array integrated with 128 NBPFs has been fabricated by using the technique with only a nine-step deposition process. The pass-bands of the filters distribute almost linearly in the range of 722.0-880.0 nm. Their relative bandwidth is smaller than 0.44%." @default.
- W2534469596 created "2016-10-28" @default.
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- W2534469596 date "2006-09-01" @default.
- W2534469596 modified "2023-10-16" @default.
- W2534469596 title "128 Channels of Integrated Filter Array in the NIR Region Fabricated by Using The Combinatorial Deposition Technique" @default.
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- W2534469596 doi "https://doi.org/10.1109/icimw.2006.368558" @default.
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