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- W2534684540 abstract "A CMOS process is developed in a research environment for integration studies of sub-50 nm MOSFETs with high-k (HiK) dielectrics, metal gates (MG), ultra-shallow junctions with laser thermal annealing (LTA), raised source/drain (RSD) and novel device architectures (e.g., double-gate transistors, strained channels). We have optimized the process parameters and show that high-performance transistors can be realized, promising direct applicability of the results to future manufacturing." @default.
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- W2534684540 date "2004-03-22" @default.
- W2534684540 modified "2023-09-24" @default.
- W2534684540 title "A practical baseline process for advanced CMOS devices research [sub-50 nm MOSFETs]" @default.
- W2534684540 doi "https://doi.org/10.1109/essderc.2003.1256802" @default.
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