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- W2534827369 abstract "Nano-sized materials are widely used for semiconductors and micro-electro-mechanical systems (MEMS) well. It is significant that the physical and mechanical properties of these materials are clarified. In this study, the molecular dynamics analysis of single crystal silicon thin film was conducted, and the effects of notch depth against the deformation and fracture behavior were investigated. The specimen size was about 10 nm /spl times/ 5 nm /spl times/ 2.5 nm and the notch depth was from about 0.5 to 4.0 nm in the loading direction of |110|. For making the thin film, the periodic boundary condition applied in depth z direction. In the stress-strain relationship, a normal stress for a loading direction increased with the increase of an applied strain. After that, the normal stress became small rapidly. As the notch depth was increased, the stiffness and maximum stress calculated were decreased. The stiffness calculated by the molecular dynamics were smaller than that by the finite element method, however the tendency, which the stiffness was decreased with increasing the notch depth, was agreed with the result calculated by finite element method. The fracture plane was perpendicular to the loading direction. A fracture criterion was that the atomic stress of notch root became a critical value. The critical stress was different from the other loading direction." @default.
- W2534827369 created "2016-10-28" @default.
- W2534827369 creator A5054749297 @default.
- W2534827369 creator A5071410528 @default.
- W2534827369 date "2006-02-15" @default.
- W2534827369 modified "2023-09-26" @default.
- W2534827369 title "Molecular dynamics analysis for micro notch effects of single crystal silicon thin film" @default.
- W2534827369 cites W1970632979 @default.
- W2534827369 cites W1994910496 @default.
- W2534827369 cites W2013125005 @default.
- W2534827369 cites W2022598690 @default.
- W2534827369 cites W2033086537 @default.
- W2534827369 cites W2036034530 @default.
- W2534827369 cites W2038667420 @default.
- W2534827369 cites W2046231727 @default.
- W2534827369 cites W2056160919 @default.
- W2534827369 cites W2318222859 @default.
- W2534827369 doi "https://doi.org/10.1109/mhs.2005.1589995" @default.
- W2534827369 hasPublicationYear "2006" @default.
- W2534827369 type Work @default.
- W2534827369 sameAs 2534827369 @default.
- W2534827369 citedByCount "1" @default.
- W2534827369 crossrefType "proceedings-article" @default.
- W2534827369 hasAuthorship W2534827369A5054749297 @default.
- W2534827369 hasAuthorship W2534827369A5071410528 @default.
- W2534827369 hasConcept C127413603 @default.
- W2534827369 hasConcept C135628077 @default.
- W2534827369 hasConcept C138885662 @default.
- W2534827369 hasConcept C147597530 @default.
- W2534827369 hasConcept C159985019 @default.
- W2534827369 hasConcept C171250308 @default.
- W2534827369 hasConcept C185592680 @default.
- W2534827369 hasConcept C191897082 @default.
- W2534827369 hasConcept C192562407 @default.
- W2534827369 hasConcept C199631012 @default.
- W2534827369 hasConcept C204366326 @default.
- W2534827369 hasConcept C21036866 @default.
- W2534827369 hasConcept C2524010 @default.
- W2534827369 hasConcept C2779372316 @default.
- W2534827369 hasConcept C33923547 @default.
- W2534827369 hasConcept C37977207 @default.
- W2534827369 hasConcept C41895202 @default.
- W2534827369 hasConcept C43369102 @default.
- W2534827369 hasConcept C544956773 @default.
- W2534827369 hasConcept C59593255 @default.
- W2534827369 hasConcept C66938386 @default.
- W2534827369 hasConceptScore W2534827369C127413603 @default.
- W2534827369 hasConceptScore W2534827369C135628077 @default.
- W2534827369 hasConceptScore W2534827369C138885662 @default.
- W2534827369 hasConceptScore W2534827369C147597530 @default.
- W2534827369 hasConceptScore W2534827369C159985019 @default.
- W2534827369 hasConceptScore W2534827369C171250308 @default.
- W2534827369 hasConceptScore W2534827369C185592680 @default.
- W2534827369 hasConceptScore W2534827369C191897082 @default.
- W2534827369 hasConceptScore W2534827369C192562407 @default.
- W2534827369 hasConceptScore W2534827369C199631012 @default.
- W2534827369 hasConceptScore W2534827369C204366326 @default.
- W2534827369 hasConceptScore W2534827369C21036866 @default.
- W2534827369 hasConceptScore W2534827369C2524010 @default.
- W2534827369 hasConceptScore W2534827369C2779372316 @default.
- W2534827369 hasConceptScore W2534827369C33923547 @default.
- W2534827369 hasConceptScore W2534827369C37977207 @default.
- W2534827369 hasConceptScore W2534827369C41895202 @default.
- W2534827369 hasConceptScore W2534827369C43369102 @default.
- W2534827369 hasConceptScore W2534827369C544956773 @default.
- W2534827369 hasConceptScore W2534827369C59593255 @default.
- W2534827369 hasConceptScore W2534827369C66938386 @default.
- W2534827369 hasLocation W25348273691 @default.
- W2534827369 hasOpenAccess W2534827369 @default.
- W2534827369 hasPrimaryLocation W25348273691 @default.
- W2534827369 hasRelatedWork W1976353105 @default.
- W2534827369 hasRelatedWork W1977246734 @default.
- W2534827369 hasRelatedWork W1978074575 @default.
- W2534827369 hasRelatedWork W1987564650 @default.
- W2534827369 hasRelatedWork W2060613461 @default.
- W2534827369 hasRelatedWork W2064275995 @default.
- W2534827369 hasRelatedWork W2069376892 @default.
- W2534827369 hasRelatedWork W2127438985 @default.
- W2534827369 hasRelatedWork W2247816186 @default.
- W2534827369 hasRelatedWork W2326173318 @default.
- W2534827369 hasRelatedWork W2333313056 @default.
- W2534827369 hasRelatedWork W2495327671 @default.
- W2534827369 hasRelatedWork W2495389563 @default.
- W2534827369 hasRelatedWork W2790521600 @default.
- W2534827369 hasRelatedWork W2796074262 @default.
- W2534827369 hasRelatedWork W2890176447 @default.
- W2534827369 hasRelatedWork W3093864196 @default.
- W2534827369 hasRelatedWork W96062576 @default.
- W2534827369 hasRelatedWork W1002168573 @default.
- W2534827369 hasRelatedWork W1481700420 @default.
- W2534827369 isParatext "false" @default.
- W2534827369 isRetracted "false" @default.
- W2534827369 magId "2534827369" @default.
- W2534827369 workType "article" @default.