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- W2534851664 endingPage "184" @default.
- W2534851664 startingPage "181" @default.
- W2534851664 abstract "In order to keep semiconductor manufacturing equipment operating stably, visualizing the basic operating status of the tools is an essential aspect of control. With the latest tools equipped with an EES (Equipment Engineering System), effective monitoring has been demonstrated through implementation of EEQA and EEQM to visualize basic operations of the tools. In this report, we explain the effectiveness of applying EES to earlier versions of exposure tools. By collecting the same data used by the latest equipment, we were able to visualize basic operations using EES through the same method employed on the latest equipment." @default.
- W2534851664 created "2016-10-28" @default.
- W2534851664 creator A5010468493 @default.
- W2534851664 creator A5022046514 @default.
- W2534851664 creator A5064136890 @default.
- W2534851664 creator A5088732339 @default.
- W2534851664 date "2008-10-01" @default.
- W2534851664 modified "2023-09-24" @default.
- W2534851664 title "Monitoring and managing system of equipment operation status by using detailed event log data extracted from exposure tool" @default.
- W2534851664 hasPublicationYear "2008" @default.
- W2534851664 type Work @default.
- W2534851664 sameAs 2534851664 @default.
- W2534851664 citedByCount "0" @default.
- W2534851664 crossrefType "proceedings-article" @default.
- W2534851664 hasAuthorship W2534851664A5010468493 @default.
- W2534851664 hasAuthorship W2534851664A5022046514 @default.
- W2534851664 hasAuthorship W2534851664A5064136890 @default.
- W2534851664 hasAuthorship W2534851664A5088732339 @default.
- W2534851664 hasConcept C115903868 @default.
- W2534851664 hasConcept C117671659 @default.
- W2534851664 hasConcept C121332964 @default.
- W2534851664 hasConcept C127413603 @default.
- W2534851664 hasConcept C149635348 @default.
- W2534851664 hasConcept C200601418 @default.
- W2534851664 hasConcept C201995342 @default.
- W2534851664 hasConcept C2779662365 @default.
- W2534851664 hasConcept C41008148 @default.
- W2534851664 hasConcept C62520636 @default.
- W2534851664 hasConceptScore W2534851664C115903868 @default.
- W2534851664 hasConceptScore W2534851664C117671659 @default.
- W2534851664 hasConceptScore W2534851664C121332964 @default.
- W2534851664 hasConceptScore W2534851664C127413603 @default.
- W2534851664 hasConceptScore W2534851664C149635348 @default.
- W2534851664 hasConceptScore W2534851664C200601418 @default.
- W2534851664 hasConceptScore W2534851664C201995342 @default.
- W2534851664 hasConceptScore W2534851664C2779662365 @default.
- W2534851664 hasConceptScore W2534851664C41008148 @default.
- W2534851664 hasConceptScore W2534851664C62520636 @default.
- W2534851664 hasLocation W25348516641 @default.
- W2534851664 hasOpenAccess W2534851664 @default.
- W2534851664 hasPrimaryLocation W25348516641 @default.
- W2534851664 hasRelatedWork W1992731955 @default.
- W2534851664 hasRelatedWork W2007555731 @default.
- W2534851664 hasRelatedWork W2018868708 @default.
- W2534851664 hasRelatedWork W2073490999 @default.
- W2534851664 hasRelatedWork W2076884766 @default.
- W2534851664 hasRelatedWork W2314931374 @default.
- W2534851664 hasRelatedWork W2350835829 @default.
- W2534851664 hasRelatedWork W2356095159 @default.
- W2534851664 hasRelatedWork W2367078600 @default.
- W2534851664 hasRelatedWork W2900924828 @default.
- W2534851664 hasRelatedWork W3003692065 @default.
- W2534851664 hasRelatedWork W3035656691 @default.
- W2534851664 hasRelatedWork W3111858435 @default.
- W2534851664 hasRelatedWork W3184344508 @default.
- W2534851664 hasRelatedWork W3186418991 @default.
- W2534851664 hasRelatedWork W2830861510 @default.
- W2534851664 hasRelatedWork W2862569122 @default.
- W2534851664 hasRelatedWork W2927890917 @default.
- W2534851664 hasRelatedWork W2960402005 @default.
- W2534851664 hasRelatedWork W3017582573 @default.
- W2534851664 isParatext "false" @default.
- W2534851664 isRetracted "false" @default.
- W2534851664 magId "2534851664" @default.
- W2534851664 workType "article" @default.