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• W2535087201 abstract "The authors present a framework for modeling anomalous diffusion during postimplant rapid thermal annealing. The model combines a detailed Monte Carlo calculation of the buildup of damage to the silicon substrate during the implant with a new kinetic model for impurity and defect diffusion. The formulation also predicts the experimentally observed decay of the anomalous diffusion. The model shows good agreement with experimental data for transient diffusion of phosphorus and boron. >" @default.
• W2535087201 created "2016-10-28" @default.
• W2535087201 creator A5017634640 @default.
• W2535087201 creator A5039652991 @default.
• W2535087201 creator A5049452696 @default.
• W2535087201 date "2003-01-06" @default.
• W2535087201 modified "2023-09-23" @default.
• W2535087201 title "A kinetic model for anomalous diffusion during post-implant annealing" @default.
• W2535087201 cites W1973703918 @default.
• W2535087201 cites W1979124469 @default.
• W2535087201 cites W1986743793 @default.
• W2535087201 cites W1994469278 @default.
• W2535087201 cites W1996625218 @default.
• W2535087201 cites W2004430630 @default.
• W2535087201 cites W2037464659 @default.
• W2535087201 cites W2056712431 @default.
• W2535087201 cites W2078821552 @default.
• W2535087201 cites W2127174326 @default.
• W2535087201 cites W2128403524 @default.
• W2535087201 doi "https://doi.org/10.1109/iedm.1988.32894" @default.
• W2535087201 hasPublicationYear "2003" @default.
• W2535087201 type Work @default.
• W2535087201 sameAs 2535087201 @default.
• W2535087201 citedByCount "4" @default.
• W2535087201 crossrefType "proceedings-article" @default.
• W2535087201 hasAuthorship W2535087201A5017634640 @default.
• W2535087201 hasAuthorship W2535087201A5039652991 @default.
• W2535087201 hasAuthorship W2535087201A5049452696 @default.
• W2535087201 hasConcept C105795698 @default.
• W2535087201 hasConcept C121332964 @default.
• W2535087201 hasConcept C135889238 @default.
• W2535087201 hasConcept C145148216 @default.
• W2535087201 hasConcept C159985019 @default.
• W2535087201 hasConcept C164602753 @default.
• W2535087201 hasConcept C178790620 @default.
• W2535087201 hasConcept C185544564 @default.
• W2535087201 hasConcept C185592680 @default.
• W2535087201 hasConcept C192562407 @default.
• W2535087201 hasConcept C19499675 @default.
• W2535087201 hasConcept C26873012 @default.
• W2535087201 hasConcept C2777855556 @default.
• W2535087201 hasConcept C3017618536 @default.
• W2535087201 hasConcept C33923547 @default.
• W2535087201 hasConcept C41008148 @default.
• W2535087201 hasConcept C41823505 @default.
• W2535087201 hasConcept C45786274 @default.
• W2535087201 hasConcept C49040817 @default.
• W2535087201 hasConcept C501308230 @default.
• W2535087201 hasConcept C544956773 @default.
• W2535087201 hasConcept C56739046 @default.
• W2535087201 hasConcept C62520636 @default.
• W2535087201 hasConcept C69357855 @default.
• W2535087201 hasConcept C71987851 @default.
• W2535087201 hasConcept C97355855 @default.
• W2535087201 hasConceptScore W2535087201C105795698 @default.
• W2535087201 hasConceptScore W2535087201C121332964 @default.
• W2535087201 hasConceptScore W2535087201C135889238 @default.
• W2535087201 hasConceptScore W2535087201C145148216 @default.
• W2535087201 hasConceptScore W2535087201C159985019 @default.
• W2535087201 hasConceptScore W2535087201C164602753 @default.
• W2535087201 hasConceptScore W2535087201C178790620 @default.
• W2535087201 hasConceptScore W2535087201C185544564 @default.
• W2535087201 hasConceptScore W2535087201C185592680 @default.
• W2535087201 hasConceptScore W2535087201C192562407 @default.
• W2535087201 hasConceptScore W2535087201C19499675 @default.
• W2535087201 hasConceptScore W2535087201C26873012 @default.
• W2535087201 hasConceptScore W2535087201C2777855556 @default.
• W2535087201 hasConceptScore W2535087201C3017618536 @default.
• W2535087201 hasConceptScore W2535087201C33923547 @default.
• W2535087201 hasConceptScore W2535087201C41008148 @default.
• W2535087201 hasConceptScore W2535087201C41823505 @default.
• W2535087201 hasConceptScore W2535087201C45786274 @default.
• W2535087201 hasConceptScore W2535087201C49040817 @default.
• W2535087201 hasConceptScore W2535087201C501308230 @default.
• W2535087201 hasConceptScore W2535087201C544956773 @default.
• W2535087201 hasConceptScore W2535087201C56739046 @default.
• W2535087201 hasConceptScore W2535087201C62520636 @default.
• W2535087201 hasConceptScore W2535087201C69357855 @default.
• W2535087201 hasConceptScore W2535087201C71987851 @default.
• W2535087201 hasConceptScore W2535087201C97355855 @default.
• W2535087201 hasLocation W25350872011 @default.
• W2535087201 hasOpenAccess W2535087201 @default.
• W2535087201 hasPrimaryLocation W25350872011 @default.
• W2535087201 hasRelatedWork W1476781834 @default.
• W2535087201 hasRelatedWork W1631993559 @default.
• W2535087201 hasRelatedWork W1967249050 @default.
• W2535087201 hasRelatedWork W1970216828 @default.
• W2535087201 hasRelatedWork W1988594635 @default.
• W2535087201 hasRelatedWork W2028709029 @default.
• W2535087201 hasRelatedWork W2032700122 @default.
• W2535087201 hasRelatedWork W2050754659 @default.
• W2535087201 hasRelatedWork W2058933295 @default.
• W2535087201 hasRelatedWork W2069527114 @default.
• W2535087201 hasRelatedWork W2072894217 @default.
• W2535087201 hasRelatedWork W2075566575 @default.
• W2535087201 hasRelatedWork W2079612747 @default.
• W2535087201 hasRelatedWork W2102274763 @default.
• W2535087201 hasRelatedWork W2103749464 @default.
• W2535087201 hasRelatedWork W2113061098 @default.
• W2535087201 hasRelatedWork W2151585963 @default.

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