Matches in SemOpenAlex for { <https://semopenalex.org/work/W2535166240> ?p ?o ?g. }
Showing items 1 to 85 of
85
with 100 items per page.
- W2535166240 abstract "A high-dielectric-constant material was applied to a practical stacked DRAM capacitor. A large unit area capacitance (40 fF/ mu m/sup 2/) and a low leakage current (<10/sup -7/ A/cm/sup 2/) have been realized by the combination of a thin (Ba/sub x/Sr/sub 1-x/)TiO/sub 3/ film having an equivalent SiO/sub 2/ thickness of 8 AA and a Pt/Ta capacitor electrode. TDDB (time-dependent dielectric breakdown) measurements have indicated good reliability of this novel capacitor cell. These characteristics show that this storage capacitor is quite promising for 256M DRAM cells.< <ETX xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>></ETX>" @default.
- W2535166240 created "2016-10-28" @default.
- W2535166240 creator A5001800768 @default.
- W2535166240 creator A5040198707 @default.
- W2535166240 creator A5046193638 @default.
- W2535166240 creator A5058147147 @default.
- W2535166240 creator A5062863706 @default.
- W2535166240 creator A5078574228 @default.
- W2535166240 creator A5084235213 @default.
- W2535166240 creator A5091310399 @default.
- W2535166240 date "2002-12-09" @default.
- W2535166240 modified "2023-10-01" @default.
- W2535166240 title "A stacked capacitor with (Ba/sub x/Sr/sub 1-x/)TiO/sub 3/ for 256M DRAM" @default.
- W2535166240 cites W2039795654 @default.
- W2535166240 cites W2059770484 @default.
- W2535166240 doi "https://doi.org/10.1109/iedm.1991.235298" @default.
- W2535166240 hasPublicationYear "2002" @default.
- W2535166240 type Work @default.
- W2535166240 sameAs 2535166240 @default.
- W2535166240 citedByCount "6" @default.
- W2535166240 countsByYear W25351662402016 @default.
- W2535166240 crossrefType "proceedings-article" @default.
- W2535166240 hasAuthorship W2535166240A5001800768 @default.
- W2535166240 hasAuthorship W2535166240A5040198707 @default.
- W2535166240 hasAuthorship W2535166240A5046193638 @default.
- W2535166240 hasAuthorship W2535166240A5058147147 @default.
- W2535166240 hasAuthorship W2535166240A5062863706 @default.
- W2535166240 hasAuthorship W2535166240A5078574228 @default.
- W2535166240 hasAuthorship W2535166240A5084235213 @default.
- W2535166240 hasAuthorship W2535166240A5091310399 @default.
- W2535166240 hasConcept C113196181 @default.
- W2535166240 hasConcept C119599485 @default.
- W2535166240 hasConcept C127413603 @default.
- W2535166240 hasConcept C133386390 @default.
- W2535166240 hasConcept C139719470 @default.
- W2535166240 hasConcept C147789679 @default.
- W2535166240 hasConcept C162324750 @default.
- W2535166240 hasConcept C16317505 @default.
- W2535166240 hasConcept C165801399 @default.
- W2535166240 hasConcept C17525397 @default.
- W2535166240 hasConcept C185592680 @default.
- W2535166240 hasConcept C192562407 @default.
- W2535166240 hasConcept C2777042071 @default.
- W2535166240 hasConcept C30066665 @default.
- W2535166240 hasConcept C43617362 @default.
- W2535166240 hasConcept C49040817 @default.
- W2535166240 hasConcept C52192207 @default.
- W2535166240 hasConcept C6432897 @default.
- W2535166240 hasConcept C7366592 @default.
- W2535166240 hasConceptScore W2535166240C113196181 @default.
- W2535166240 hasConceptScore W2535166240C119599485 @default.
- W2535166240 hasConceptScore W2535166240C127413603 @default.
- W2535166240 hasConceptScore W2535166240C133386390 @default.
- W2535166240 hasConceptScore W2535166240C139719470 @default.
- W2535166240 hasConceptScore W2535166240C147789679 @default.
- W2535166240 hasConceptScore W2535166240C162324750 @default.
- W2535166240 hasConceptScore W2535166240C16317505 @default.
- W2535166240 hasConceptScore W2535166240C165801399 @default.
- W2535166240 hasConceptScore W2535166240C17525397 @default.
- W2535166240 hasConceptScore W2535166240C185592680 @default.
- W2535166240 hasConceptScore W2535166240C192562407 @default.
- W2535166240 hasConceptScore W2535166240C2777042071 @default.
- W2535166240 hasConceptScore W2535166240C30066665 @default.
- W2535166240 hasConceptScore W2535166240C43617362 @default.
- W2535166240 hasConceptScore W2535166240C49040817 @default.
- W2535166240 hasConceptScore W2535166240C52192207 @default.
- W2535166240 hasConceptScore W2535166240C6432897 @default.
- W2535166240 hasConceptScore W2535166240C7366592 @default.
- W2535166240 hasLocation W25351662401 @default.
- W2535166240 hasOpenAccess W2535166240 @default.
- W2535166240 hasPrimaryLocation W25351662401 @default.
- W2535166240 hasRelatedWork W1969335089 @default.
- W2535166240 hasRelatedWork W2093306765 @default.
- W2535166240 hasRelatedWork W2101384741 @default.
- W2535166240 hasRelatedWork W2102125877 @default.
- W2535166240 hasRelatedWork W2120716300 @default.
- W2535166240 hasRelatedWork W2164607314 @default.
- W2535166240 hasRelatedWork W2539437701 @default.
- W2535166240 hasRelatedWork W2888296733 @default.
- W2535166240 hasRelatedWork W2911941831 @default.
- W2535166240 hasRelatedWork W4253731651 @default.
- W2535166240 isParatext "false" @default.
- W2535166240 isRetracted "false" @default.
- W2535166240 magId "2535166240" @default.
- W2535166240 workType "article" @default.