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- W2535863536 abstract "This paper presents a fully CMOS technology integrated capacitive absolute pressure sensor with on-chip switched capacitor integration circuitry for barometric applications. The overall sensor system process merges CMOS IC technology and a bulk micromachining process utilized after the pre-CMOS process, thus it does not change the IC technology sequence. The sensor consists of a switched capacitor interface readout circuit, a sandwich-structured capacitive transducer with a composite-membrane and a reference capacitor, all integrated on the same chip by a standard CMOS process." @default.
- W2535863536 created "2016-10-28" @default.
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- W2535863536 date "2005-06-07" @default.
- W2535863536 modified "2023-09-26" @default.
- W2535863536 title "A fully CMOS compatible integrated absolute pressure sensor" @default.
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- W2535863536 doi "https://doi.org/10.1109/icsict.2004.1435187" @default.
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