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- W2536095564 abstract "Abstract The Laser Voltage Imaging (LVI) technique, introduced in 2007 [1][2], has been demonstrated as a successful defect localization technique to address problems on advanced technologies. In this paper, several 28nm case studies are described on which the LVI technique and its derivatives provide a real added value to the defect localization part of the Failure Analysis flow. We will show that LVI images can be used as a great reference to improve the CAD alignment overlay accuracy which is critical for advanced technology debug. Then, we will introduce several case studies on 28nm technology on which Thermal Frequency Imaging (TFI) and Second Harmonic Detection (two LVI derivative techniques) allow efficient defect localization." @default.
- W2536095564 created "2016-10-28" @default.
- W2536095564 creator A5005506308 @default.
- W2536095564 creator A5020129685 @default.
- W2536095564 creator A5023784640 @default.
- W2536095564 creator A5038230550 @default.
- W2536095564 creator A5078695492 @default.
- W2536095564 creator A5089883915 @default.
- W2536095564 creator A5048101373 @default.
- W2536095564 date "2013-11-01" @default.
- W2536095564 modified "2023-09-23" @default.
- W2536095564 title "Laser Voltage Imaging and Its Derivatives—Efficient Techniques to Address Defect on 28 nm Technology" @default.
- W2536095564 doi "https://doi.org/10.31399/asm.cp.istfa2013p0306" @default.
- W2536095564 hasPublicationYear "2013" @default.
- W2536095564 type Work @default.
- W2536095564 sameAs 2536095564 @default.
- W2536095564 citedByCount "7" @default.
- W2536095564 countsByYear W25360955642017 @default.
- W2536095564 countsByYear W25360955642018 @default.
- W2536095564 countsByYear W25360955642019 @default.
- W2536095564 countsByYear W25360955642020 @default.
- W2536095564 countsByYear W25360955642021 @default.
- W2536095564 crossrefType "proceedings-article" @default.
- W2536095564 hasAuthorship W2536095564A5005506308 @default.
- W2536095564 hasAuthorship W2536095564A5020129685 @default.
- W2536095564 hasAuthorship W2536095564A5023784640 @default.
- W2536095564 hasAuthorship W2536095564A5038230550 @default.
- W2536095564 hasAuthorship W2536095564A5048101373 @default.
- W2536095564 hasAuthorship W2536095564A5078695492 @default.
- W2536095564 hasAuthorship W2536095564A5089883915 @default.
- W2536095564 hasConcept C119599485 @default.
- W2536095564 hasConcept C120665830 @default.
- W2536095564 hasConcept C121332964 @default.
- W2536095564 hasConcept C127413603 @default.
- W2536095564 hasConcept C136085584 @default.
- W2536095564 hasConcept C165801399 @default.
- W2536095564 hasConcept C168065819 @default.
- W2536095564 hasConcept C194789388 @default.
- W2536095564 hasConcept C199360897 @default.
- W2536095564 hasConcept C199639397 @default.
- W2536095564 hasConcept C24326235 @default.
- W2536095564 hasConcept C41008148 @default.
- W2536095564 hasConcept C520434653 @default.
- W2536095564 hasConceptScore W2536095564C119599485 @default.
- W2536095564 hasConceptScore W2536095564C120665830 @default.
- W2536095564 hasConceptScore W2536095564C121332964 @default.
- W2536095564 hasConceptScore W2536095564C127413603 @default.
- W2536095564 hasConceptScore W2536095564C136085584 @default.
- W2536095564 hasConceptScore W2536095564C165801399 @default.
- W2536095564 hasConceptScore W2536095564C168065819 @default.
- W2536095564 hasConceptScore W2536095564C194789388 @default.
- W2536095564 hasConceptScore W2536095564C199360897 @default.
- W2536095564 hasConceptScore W2536095564C199639397 @default.
- W2536095564 hasConceptScore W2536095564C24326235 @default.
- W2536095564 hasConceptScore W2536095564C41008148 @default.
- W2536095564 hasConceptScore W2536095564C520434653 @default.
- W2536095564 hasLocation W25360955641 @default.
- W2536095564 hasOpenAccess W2536095564 @default.
- W2536095564 hasPrimaryLocation W25360955641 @default.
- W2536095564 hasRelatedWork W105941708 @default.
- W2536095564 hasRelatedWork W1483845062 @default.
- W2536095564 hasRelatedWork W1535947298 @default.
- W2536095564 hasRelatedWork W1547867176 @default.
- W2536095564 hasRelatedWork W1578053891 @default.
- W2536095564 hasRelatedWork W1887440491 @default.
- W2536095564 hasRelatedWork W1987935534 @default.
- W2536095564 hasRelatedWork W2035726034 @default.
- W2536095564 hasRelatedWork W2120071210 @default.
- W2536095564 hasRelatedWork W97732546 @default.
- W2536095564 isParatext "false" @default.
- W2536095564 isRetracted "false" @default.
- W2536095564 magId "2536095564" @default.
- W2536095564 workType "article" @default.