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- W2536232016 abstract "A novel self-aligned pocket implantation (SPI) technology has been developed. This technology features a localized 'pocket' implantation using a gate electrode and TiSi/sub 2/ films as self-aligned masks. The gate polysilicon is patterned by KrF excimer laser lithography. The measured minimum gate length Lg (the physical gate length) is 0.21 mu m. This process provides high punchthrough resistance and high current driving capability while maintaining low impurity concentration in the well (less than 5*10/sup 16/ cm/sup -3/). The drain junction capacitance is decreased by 30% for N-MOSFET, and by 49% for P-MOSFET, compared to conventional LDD (lightly doped drain) devices. It is found that a dual gate CMOS fabricated by the SPI technology achieves high-speed circuit performance. >" @default.
- W2536232016 created "2016-10-28" @default.
- W2536232016 creator A5017073033 @default.
- W2536232016 creator A5020765861 @default.
- W2536232016 creator A5032003867 @default.
- W2536232016 creator A5056667606 @default.
- W2536232016 creator A5067724862 @default.
- W2536232016 date "2002-12-09" @default.
- W2536232016 modified "2023-09-27" @default.
- W2536232016 title "A self-aligned pocket implantation (SPI) technology for 0,. mu m-dual gate CMOS" @default.
- W2536232016 cites W2055403529 @default.
- W2536232016 cites W2089544096 @default.
- W2536232016 doi "https://doi.org/10.1109/iedm.1991.235390" @default.
- W2536232016 hasPublicationYear "2002" @default.
- W2536232016 type Work @default.
- W2536232016 sameAs 2536232016 @default.
- W2536232016 citedByCount "4" @default.
- W2536232016 crossrefType "proceedings-article" @default.
- W2536232016 hasAuthorship W2536232016A5017073033 @default.
- W2536232016 hasAuthorship W2536232016A5020765861 @default.
- W2536232016 hasAuthorship W2536232016A5032003867 @default.
- W2536232016 hasAuthorship W2536232016A5056667606 @default.
- W2536232016 hasAuthorship W2536232016A5067724862 @default.
- W2536232016 hasConcept C119599485 @default.
- W2536232016 hasConcept C127413603 @default.
- W2536232016 hasConcept C145148216 @default.
- W2536232016 hasConcept C147789679 @default.
- W2536232016 hasConcept C165801399 @default.
- W2536232016 hasConcept C172385210 @default.
- W2536232016 hasConcept C17525397 @default.
- W2536232016 hasConcept C178790620 @default.
- W2536232016 hasConcept C185592680 @default.
- W2536232016 hasConcept C192562407 @default.
- W2536232016 hasConcept C204223013 @default.
- W2536232016 hasConcept C2361726 @default.
- W2536232016 hasConcept C2778413303 @default.
- W2536232016 hasConcept C30066665 @default.
- W2536232016 hasConcept C41823505 @default.
- W2536232016 hasConcept C46362747 @default.
- W2536232016 hasConcept C49040817 @default.
- W2536232016 hasConcept C51140833 @default.
- W2536232016 hasConcept C67337642 @default.
- W2536232016 hasConceptScore W2536232016C119599485 @default.
- W2536232016 hasConceptScore W2536232016C127413603 @default.
- W2536232016 hasConceptScore W2536232016C145148216 @default.
- W2536232016 hasConceptScore W2536232016C147789679 @default.
- W2536232016 hasConceptScore W2536232016C165801399 @default.
- W2536232016 hasConceptScore W2536232016C172385210 @default.
- W2536232016 hasConceptScore W2536232016C17525397 @default.
- W2536232016 hasConceptScore W2536232016C178790620 @default.
- W2536232016 hasConceptScore W2536232016C185592680 @default.
- W2536232016 hasConceptScore W2536232016C192562407 @default.
- W2536232016 hasConceptScore W2536232016C204223013 @default.
- W2536232016 hasConceptScore W2536232016C2361726 @default.
- W2536232016 hasConceptScore W2536232016C2778413303 @default.
- W2536232016 hasConceptScore W2536232016C30066665 @default.
- W2536232016 hasConceptScore W2536232016C41823505 @default.
- W2536232016 hasConceptScore W2536232016C46362747 @default.
- W2536232016 hasConceptScore W2536232016C49040817 @default.
- W2536232016 hasConceptScore W2536232016C51140833 @default.
- W2536232016 hasConceptScore W2536232016C67337642 @default.
- W2536232016 hasLocation W25362320161 @default.
- W2536232016 hasOpenAccess W2536232016 @default.
- W2536232016 hasPrimaryLocation W25362320161 @default.
- W2536232016 hasRelatedWork W1507855249 @default.
- W2536232016 hasRelatedWork W1509495500 @default.
- W2536232016 hasRelatedWork W1939204642 @default.
- W2536232016 hasRelatedWork W1985245629 @default.
- W2536232016 hasRelatedWork W2005191170 @default.
- W2536232016 hasRelatedWork W2006258248 @default.
- W2536232016 hasRelatedWork W2060349318 @default.
- W2536232016 hasRelatedWork W2103881078 @default.
- W2536232016 hasRelatedWork W2117252672 @default.
- W2536232016 hasRelatedWork W2136547765 @default.
- W2536232016 hasRelatedWork W2159923640 @default.
- W2536232016 hasRelatedWork W2169867299 @default.
- W2536232016 hasRelatedWork W2533673669 @default.
- W2536232016 hasRelatedWork W2534307122 @default.
- W2536232016 hasRelatedWork W2535318393 @default.
- W2536232016 hasRelatedWork W2536435376 @default.
- W2536232016 hasRelatedWork W2544026950 @default.
- W2536232016 hasRelatedWork W2545728317 @default.
- W2536232016 hasRelatedWork W2139945914 @default.
- W2536232016 hasRelatedWork W3105163807 @default.
- W2536232016 isParatext "false" @default.
- W2536232016 isRetracted "false" @default.
- W2536232016 magId "2536232016" @default.
- W2536232016 workType "article" @default.