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• W2536890974 abstract "The key points of sub-half-micron CMOS technologies for 64-Mb DRAM fabrication are described. The main features of the technologies are (1) an asymmetrical stacked trench capacitor (AST) cell, (2) localized channel implantation through the field oxide (LIF), and (3) a 0.4- mu m transistor with LDD (lightly doped drain) n/sup -/ impurity of arsenic. The lithographic levels are 0.4 mu m for critical layers. achieved using a KrF excimer laser stepper. The AST cell has a stacked capacitor in a trench; the trenches are located asymmetrically with respect to each other. A small cell area of 1.53 mu m/sup 2/ has been achieved by adopting the LIF isolation and the As LDD transistor for the AST cell. An experimental 64-Mb DRAM chip has been successfully fabricated using these technologies. >" @default.
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• W2536890974 date "2002-12-04" @default.
• W2536890974 modified "2023-09-28" @default.
• W2536890974 title "Process integration for 64 M DRAM using an asymmetrical stacked trench capacitor (AST) cell" @default.
• W2536890974 cites W2031918342 @default.
• W2536890974 doi "https://doi.org/10.1109/iedm.1990.237116" @default.
• W2536890974 hasPublicationYear "2002" @default.
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