Matches in SemOpenAlex for { <https://semopenalex.org/work/W2537036698> ?p ?o ?g. }
Showing items 1 to 97 of
97
with 100 items per page.
- W2537036698 abstract "A new polysilicon surface micromachining technique for fabricating and assembling three-dimensional structures has been developed. Single-layer polysilicon elements and laminated polysilicon panels incorporating trapped-glass reinforcement ribs have been successfully fabricated on a silicon substrate with robust and continuous hinges that facilitate out-of-plane rotation and assembly. To realize a stable three-dimensional structure. one of the device's elevatable panel components is terminated with an array of open windows, and the mating rotatable element has a matched set of protruding microrivets with flexible barbs that readily flex to facilitate their joining and assembly. Because the microrivet barb tip-to-barb tip separation is larger than the opening in the mating window, the barbs flex inward as they pass through the open window and then expand to their original shape upon exiting the window, resulting in a permanently latched joint and a three-dimensional structure. Three novel microrivet designs have been micromachined to facilitate the latching process, including a simple arrowhead design, a high-aspect ratio arrowhead variant, and a rivet-like structure with a hemispherical shaped cap and a flexible split shank." @default.
- W2537036698 created "2016-10-28" @default.
- W2537036698 creator A5001612623 @default.
- W2537036698 creator A5002543725 @default.
- W2537036698 creator A5016412216 @default.
- W2537036698 creator A5025306342 @default.
- W2537036698 creator A5025775481 @default.
- W2537036698 creator A5050795498 @default.
- W2537036698 creator A5068184797 @default.
- W2537036698 creator A5072095158 @default.
- W2537036698 creator A5073394275 @default.
- W2537036698 date "2003-07-10" @default.
- W2537036698 modified "2023-09-27" @default.
- W2537036698 title "Polysilicon surface micromachined structural entities with continuous hinges and microrivets for assembling three-dimensional MEMS devices" @default.
- W2537036698 cites W2137178805 @default.
- W2537036698 doi "https://doi.org/10.1109/ets.2001.979426" @default.
- W2537036698 hasPublicationYear "2003" @default.
- W2537036698 type Work @default.
- W2537036698 sameAs 2537036698 @default.
- W2537036698 citedByCount "0" @default.
- W2537036698 crossrefType "proceedings-article" @default.
- W2537036698 hasAuthorship W2537036698A5001612623 @default.
- W2537036698 hasAuthorship W2537036698A5002543725 @default.
- W2537036698 hasAuthorship W2537036698A5016412216 @default.
- W2537036698 hasAuthorship W2537036698A5025306342 @default.
- W2537036698 hasAuthorship W2537036698A5025775481 @default.
- W2537036698 hasAuthorship W2537036698A5050795498 @default.
- W2537036698 hasAuthorship W2537036698A5068184797 @default.
- W2537036698 hasAuthorship W2537036698A5072095158 @default.
- W2537036698 hasAuthorship W2537036698A5073394275 @default.
- W2537036698 hasConcept C111368507 @default.
- W2537036698 hasConcept C111919701 @default.
- W2537036698 hasConcept C127313418 @default.
- W2537036698 hasConcept C127413603 @default.
- W2537036698 hasConcept C136525101 @default.
- W2537036698 hasConcept C142724271 @default.
- W2537036698 hasConcept C145667562 @default.
- W2537036698 hasConcept C171250308 @default.
- W2537036698 hasConcept C192562407 @default.
- W2537036698 hasConcept C204787440 @default.
- W2537036698 hasConcept C2777289219 @default.
- W2537036698 hasConcept C2778751112 @default.
- W2537036698 hasConcept C2779227376 @default.
- W2537036698 hasConcept C37977207 @default.
- W2537036698 hasConcept C41008148 @default.
- W2537036698 hasConcept C41075158 @default.
- W2537036698 hasConcept C44000306 @default.
- W2537036698 hasConcept C49040817 @default.
- W2537036698 hasConcept C66938386 @default.
- W2537036698 hasConcept C71924100 @default.
- W2537036698 hasConceptScore W2537036698C111368507 @default.
- W2537036698 hasConceptScore W2537036698C111919701 @default.
- W2537036698 hasConceptScore W2537036698C127313418 @default.
- W2537036698 hasConceptScore W2537036698C127413603 @default.
- W2537036698 hasConceptScore W2537036698C136525101 @default.
- W2537036698 hasConceptScore W2537036698C142724271 @default.
- W2537036698 hasConceptScore W2537036698C145667562 @default.
- W2537036698 hasConceptScore W2537036698C171250308 @default.
- W2537036698 hasConceptScore W2537036698C192562407 @default.
- W2537036698 hasConceptScore W2537036698C204787440 @default.
- W2537036698 hasConceptScore W2537036698C2777289219 @default.
- W2537036698 hasConceptScore W2537036698C2778751112 @default.
- W2537036698 hasConceptScore W2537036698C2779227376 @default.
- W2537036698 hasConceptScore W2537036698C37977207 @default.
- W2537036698 hasConceptScore W2537036698C41008148 @default.
- W2537036698 hasConceptScore W2537036698C41075158 @default.
- W2537036698 hasConceptScore W2537036698C44000306 @default.
- W2537036698 hasConceptScore W2537036698C49040817 @default.
- W2537036698 hasConceptScore W2537036698C66938386 @default.
- W2537036698 hasConceptScore W2537036698C71924100 @default.
- W2537036698 hasLocation W25370366981 @default.
- W2537036698 hasOpenAccess W2537036698 @default.
- W2537036698 hasPrimaryLocation W25370366981 @default.
- W2537036698 hasRelatedWork W1592323162 @default.
- W2537036698 hasRelatedWork W2024553901 @default.
- W2537036698 hasRelatedWork W2116249668 @default.
- W2537036698 hasRelatedWork W2120697026 @default.
- W2537036698 hasRelatedWork W2129582055 @default.
- W2537036698 hasRelatedWork W2140293893 @default.
- W2537036698 hasRelatedWork W2160043444 @default.
- W2537036698 hasRelatedWork W2281130119 @default.
- W2537036698 hasRelatedWork W2354890410 @default.
- W2537036698 hasRelatedWork W4732687 @default.
- W2537036698 hasRelatedWork W1505241811 @default.
- W2537036698 hasRelatedWork W1547761713 @default.
- W2537036698 hasRelatedWork W1586959682 @default.
- W2537036698 hasRelatedWork W2134822028 @default.
- W2537036698 hasRelatedWork W2248802869 @default.
- W2537036698 hasRelatedWork W2249188227 @default.
- W2537036698 hasRelatedWork W2840423134 @default.
- W2537036698 hasRelatedWork W2851786593 @default.
- W2537036698 hasRelatedWork W2866572575 @default.
- W2537036698 hasRelatedWork W2958851946 @default.
- W2537036698 isParatext "false" @default.
- W2537036698 isRetracted "false" @default.
- W2537036698 magId "2537036698" @default.
- W2537036698 workType "article" @default.