Matches in SemOpenAlex for { <https://semopenalex.org/work/W2538784503> ?p ?o ?g. }
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- W2538784503 endingPage "218" @default.
- W2538784503 startingPage "215" @default.
- W2538784503 abstract "To solve tool difference problems in semiconductor fabrication, it is necessary to identify problematic tool from numbers of process tools and process steps, and discover the cause of its performance difference. In this paper we propose a method to assist engineers in finding cause of tool difference. This method visualizes tool difference transition by post-processing results of periodically executed regression analysis. Effectiveness of this method is shown by Monte Carlo simulation based on a conceptual model of a fabrication line." @default.
- W2538784503 created "2016-10-28" @default.
- W2538784503 creator A5014479426 @default.
- W2538784503 creator A5027912089 @default.
- W2538784503 creator A5083745704 @default.
- W2538784503 date "2008-10-01" @default.
- W2538784503 modified "2023-09-24" @default.
- W2538784503 title "An algorithm to visualize tool difference transitions in semiconductor fabrications" @default.
- W2538784503 cites W2110282784 @default.
- W2538784503 cites W2158758163 @default.
- W2538784503 cites W2158866630 @default.
- W2538784503 cites W2160203863 @default.
- W2538784503 hasPublicationYear "2008" @default.
- W2538784503 type Work @default.
- W2538784503 sameAs 2538784503 @default.
- W2538784503 citedByCount "0" @default.
- W2538784503 crossrefType "proceedings-article" @default.
- W2538784503 hasAuthorship W2538784503A5014479426 @default.
- W2538784503 hasAuthorship W2538784503A5027912089 @default.
- W2538784503 hasAuthorship W2538784503A5083745704 @default.
- W2538784503 hasConcept C105795698 @default.
- W2538784503 hasConcept C11413529 @default.
- W2538784503 hasConcept C119599485 @default.
- W2538784503 hasConcept C127413603 @default.
- W2538784503 hasConcept C136525101 @default.
- W2538784503 hasConcept C142724271 @default.
- W2538784503 hasConcept C160671074 @default.
- W2538784503 hasConcept C19499675 @default.
- W2538784503 hasConcept C199360897 @default.
- W2538784503 hasConcept C204787440 @default.
- W2538784503 hasConcept C3018023364 @default.
- W2538784503 hasConcept C33923547 @default.
- W2538784503 hasConcept C41008148 @default.
- W2538784503 hasConcept C66018809 @default.
- W2538784503 hasConcept C71924100 @default.
- W2538784503 hasConcept C98045186 @default.
- W2538784503 hasConceptScore W2538784503C105795698 @default.
- W2538784503 hasConceptScore W2538784503C11413529 @default.
- W2538784503 hasConceptScore W2538784503C119599485 @default.
- W2538784503 hasConceptScore W2538784503C127413603 @default.
- W2538784503 hasConceptScore W2538784503C136525101 @default.
- W2538784503 hasConceptScore W2538784503C142724271 @default.
- W2538784503 hasConceptScore W2538784503C160671074 @default.
- W2538784503 hasConceptScore W2538784503C19499675 @default.
- W2538784503 hasConceptScore W2538784503C199360897 @default.
- W2538784503 hasConceptScore W2538784503C204787440 @default.
- W2538784503 hasConceptScore W2538784503C3018023364 @default.
- W2538784503 hasConceptScore W2538784503C33923547 @default.
- W2538784503 hasConceptScore W2538784503C41008148 @default.
- W2538784503 hasConceptScore W2538784503C66018809 @default.
- W2538784503 hasConceptScore W2538784503C71924100 @default.
- W2538784503 hasConceptScore W2538784503C98045186 @default.
- W2538784503 hasLocation W25387845031 @default.
- W2538784503 hasOpenAccess W2538784503 @default.
- W2538784503 hasPrimaryLocation W25387845031 @default.
- W2538784503 hasRelatedWork W1509756396 @default.
- W2538784503 hasRelatedWork W1905480126 @default.
- W2538784503 hasRelatedWork W1979054523 @default.
- W2538784503 hasRelatedWork W2000897687 @default.
- W2538784503 hasRelatedWork W2025972982 @default.
- W2538784503 hasRelatedWork W2032636063 @default.
- W2538784503 hasRelatedWork W2032905943 @default.
- W2538784503 hasRelatedWork W2036823620 @default.
- W2538784503 hasRelatedWork W2044345090 @default.
- W2538784503 hasRelatedWork W2068486747 @default.
- W2538784503 hasRelatedWork W2127994986 @default.
- W2538784503 hasRelatedWork W2154615099 @default.
- W2538784503 hasRelatedWork W2168401950 @default.
- W2538784503 hasRelatedWork W2529744334 @default.
- W2538784503 hasRelatedWork W2544503189 @default.
- W2538784503 hasRelatedWork W2565428316 @default.
- W2538784503 hasRelatedWork W2149191700 @default.
- W2538784503 hasRelatedWork W2524627222 @default.
- W2538784503 hasRelatedWork W3109234652 @default.
- W2538784503 hasRelatedWork W3154805711 @default.
- W2538784503 isParatext "false" @default.
- W2538784503 isRetracted "false" @default.
- W2538784503 magId "2538784503" @default.
- W2538784503 workType "article" @default.