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- W2538830689 abstract "In this paper, the incident angle dependence of assisting O/sub 2/ cluster ion beams for various film properties was reported. Surface roughness and AFM image of Ta/sub 2/O/sub 5/ films was shown." @default.
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- W2538830689 date "2004-05-13" @default.
- W2538830689 modified "2023-09-23" @default.
- W2538830689 title "Incident angle dependence of O/sub 2/ cluster ions on Ta/sub 2/O/sub 5/ thin film properties" @default.
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- W2538830689 doi "https://doi.org/10.1109/imnc.2003.1268749" @default.
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