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- W2538887659 abstract "With the miniaturization of devices, fluctuations of device characteristics have become a major problem for design for manufacturability (DFM). In this paper, origins of device fluctuations are explained in detail. Fluctuations are basically classified in three categories, wafer-to-wafer, across-the-wafer and within-a-chip fluctuations. Some fluctuations are inevitable by nature, and will far apart from the requirement of ITRS semiconductor roadmap. TCAD was effectively used to understand these fluctuations. Two proposals regarding the usage of TCAD are made for LSI designers" @default.
- W2538887659 created "2016-10-28" @default.
- W2538887659 creator A5072440520 @default.
- W2538887659 date "2006-04-07" @default.
- W2538887659 modified "2023-09-26" @default.
- W2538887659 title "Design with Fluctuations of Device Characteristics - TCAD can be of any help ? -" @default.
- W2538887659 cites W1662499048 @default.
- W2538887659 cites W2114131053 @default.
- W2538887659 doi "https://doi.org/10.1109/icasic.2005.1611436" @default.
- W2538887659 hasPublicationYear "2006" @default.
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