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- W2540906258 abstract "We report on the design, fabrication and characterization of piezoelectrically actuated single-crystal silicon plate resonators vibrating mainly in their bulk acoustic wave modes. Two resonator types are presented: one operates in the square extensional mode at 26 MHz with Q~18000 and motional resistance R <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>m</sub> ~0.240 kOmega, while the other resonator features a resonance at 22 MHz with Q~51000 and R <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>m</sub> ~1.5 kOmega. The resonators are characterized electrically and by scanning laser interferometry. Measured vibration fields are compared to simulated eigenmodes." @default.
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- W2540906258 date "2008-11-01" @default.
- W2540906258 modified "2023-09-24" @default.
- W2540906258 title "Piezoelectrically transduced single-crystal-silicon plate resonators" @default.
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- W2540906258 doi "https://doi.org/10.1109/ultsym.2008.0171" @default.
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