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- W2541036195 abstract "This paper reports on a conceptual design for a modular XYZ micro/nano-positioning stage by employing bridge amplified flexure mechanism and piezoelectric actuators. The mechanism design and analysis of a new terse parallel flexure stage with three translational degrees-of-freedom (DOF) is presented. The FEA simulation of dynamics analysis and fatigue analysis are conducted to reveal the capacity of the stage. Due to a larger enlargement ratio of the amplifier of bridge type and prismatic joints with good decoupling property, the XYZ micro/nano-positioning stage exhibits a large almost-decoupled motion along three working axes. Moreover, the application of modular design reduces the cost for repair and replacing. The capacities of the reported design are validated by performing simulation study." @default.
- W2541036195 created "2016-11-04" @default.
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- W2541036195 date "2016-08-01" @default.
- W2541036195 modified "2023-09-23" @default.
- W2541036195 title "Design and analysis of an in-plane flexure XYZ micro/nano-positioning stage" @default.
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- W2541036195 doi "https://doi.org/10.1109/icarm.2016.7606946" @default.
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