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- W2541351545 abstract "In this paper, 3D proximity effect correction for multi-layer structures in electron beam lithography was studied. The image diagram of scattered electrons in 3-layer structures (Al, W/SiO/sub 2/, Si) was shown." @default.
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- W2541351545 date "2004-05-06" @default.
- W2541351545 modified "2023-09-26" @default.
- W2541351545 title "3D proximity effect correction for multi-layer structures in EB lithography" @default.
- W2541351545 doi "https://doi.org/10.1109/imnc.2003.1268625" @default.
- W2541351545 hasPublicationYear "2004" @default.
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