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- W2541408259 abstract "This paper describes a novel fabrication process for control electrodes which enables a micromirror array to be fabricated on LSIs. Electrodes designed to reduce drive voltage of the micromirror can be fabricated flexibly. Novel anti-sticking technology, in which a polyimide film is deposited only on control electrodes, prevents sticking between mirrors and electrodes. We fabricated a 100-ch micromirror array. The maximum rotational angle of 1/spl deg/ at 30 V was achieved using our developed technology." @default.
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- W2541408259 date "2004-03-22" @default.
- W2541408259 modified "2023-09-25" @default.
- W2541408259 title "Novel fabrication process and structure of a low-voltage-operation micromirror array for optical MEMS switches" @default.
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- W2541408259 doi "https://doi.org/10.1109/iedm.2003.1269439" @default.
- W2541408259 hasPublicationYear "2004" @default.
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