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- W2541452807 abstract "With OPC technology's wide usage in UDSM and nanometer scale IC manufacture today, new OPC tool with higher efficiency is demanded. In this paper, the framework of a new OPC tool is reported. Its layout content-aware dissection and correction flow along with the corresponding scripting commands are described as well. The performance of tool is demonstrated by experiments." @default.
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- W2541452807 date "2005-06-07" @default.
- W2541452807 modified "2023-09-24" @default.
- W2541452807 title "A content-driven model-based OPC tool" @default.
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- W2541452807 doi "https://doi.org/10.1109/icsict.2004.1436690" @default.
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