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- W2541561231 abstract "We propose a novel process whereby Antimony Assisted Arsenic Source/Drain Extension (A/sup 3/ SDE) is employed to realize a steep and retrograde indium pocket profile for sub-0.1 /spl mu/m nMOSFETs. By engineering the defect distributions in the amorphous layer created by an indium implant, this new process improves by 8% the current drive while maintaining the same I/sub off/. It reduces nMOS diode leakage by two orders of magnitude and sidewall junction capacitance near the gate by 14%. Reliability assessment of devices fabricated by the A/sup 3/ SDE process reveals significant improvement in hot carrier effects and no observable degradation of gate oxide integrity." @default.
- W2541561231 created "2016-11-04" @default.
- W2541561231 creator A5005407414 @default.
- W2541561231 creator A5005496850 @default.
- W2541561231 creator A5012121244 @default.
- W2541561231 creator A5033141421 @default.
- W2541561231 creator A5039630528 @default.
- W2541561231 creator A5040426821 @default.
- W2541561231 creator A5049101463 @default.
- W2541561231 creator A5051102607 @default.
- W2541561231 creator A5067685024 @default.
- W2541561231 creator A5085545279 @default.
- W2541561231 creator A5088460967 @default.
- W2541561231 date "2002-11-13" @default.
- W2541561231 modified "2023-09-22" @default.
- W2541561231 title "Antimony assisted arsenic S/D extension (A/sup 3/ SDE) engineering for sub-0.1 μm nMOSFETs : a novel approach to steep and retrograde indium pocket profiles" @default.
- W2541561231 cites W2116629910 @default.
- W2541561231 cites W2133891561 @default.
- W2541561231 cites W2536315842 @default.
- W2541561231 cites W2545272249 @default.
- W2541561231 doi "https://doi.org/10.1109/iedm.2001.979403" @default.
- W2541561231 hasPublicationYear "2002" @default.
- W2541561231 type Work @default.
- W2541561231 sameAs 2541561231 @default.
- W2541561231 citedByCount "2" @default.
- W2541561231 crossrefType "proceedings-article" @default.
- W2541561231 hasAuthorship W2541561231A5005407414 @default.
- W2541561231 hasAuthorship W2541561231A5005496850 @default.
- W2541561231 hasAuthorship W2541561231A5012121244 @default.
- W2541561231 hasAuthorship W2541561231A5033141421 @default.
- W2541561231 hasAuthorship W2541561231A5039630528 @default.
- W2541561231 hasAuthorship W2541561231A5040426821 @default.
- W2541561231 hasAuthorship W2541561231A5049101463 @default.
- W2541561231 hasAuthorship W2541561231A5051102607 @default.
- W2541561231 hasAuthorship W2541561231A5067685024 @default.
- W2541561231 hasAuthorship W2541561231A5085545279 @default.
- W2541561231 hasAuthorship W2541561231A5088460967 @default.
- W2541561231 hasConcept C119599485 @default.
- W2541561231 hasConcept C127413603 @default.
- W2541561231 hasConcept C147789679 @default.
- W2541561231 hasConcept C165801399 @default.
- W2541561231 hasConcept C172385210 @default.
- W2541561231 hasConcept C17525397 @default.
- W2541561231 hasConcept C185592680 @default.
- W2541561231 hasConcept C191897082 @default.
- W2541561231 hasConcept C192562407 @default.
- W2541561231 hasConcept C197162436 @default.
- W2541561231 hasConcept C2778413303 @default.
- W2541561231 hasConcept C30066665 @default.
- W2541561231 hasConcept C49040817 @default.
- W2541561231 hasConcept C502230775 @default.
- W2541561231 hasConcept C541565711 @default.
- W2541561231 hasConcept C543292547 @default.
- W2541561231 hasConcept C67337642 @default.
- W2541561231 hasConcept C78434282 @default.
- W2541561231 hasConceptScore W2541561231C119599485 @default.
- W2541561231 hasConceptScore W2541561231C127413603 @default.
- W2541561231 hasConceptScore W2541561231C147789679 @default.
- W2541561231 hasConceptScore W2541561231C165801399 @default.
- W2541561231 hasConceptScore W2541561231C172385210 @default.
- W2541561231 hasConceptScore W2541561231C17525397 @default.
- W2541561231 hasConceptScore W2541561231C185592680 @default.
- W2541561231 hasConceptScore W2541561231C191897082 @default.
- W2541561231 hasConceptScore W2541561231C192562407 @default.
- W2541561231 hasConceptScore W2541561231C197162436 @default.
- W2541561231 hasConceptScore W2541561231C2778413303 @default.
- W2541561231 hasConceptScore W2541561231C30066665 @default.
- W2541561231 hasConceptScore W2541561231C49040817 @default.
- W2541561231 hasConceptScore W2541561231C502230775 @default.
- W2541561231 hasConceptScore W2541561231C541565711 @default.
- W2541561231 hasConceptScore W2541561231C543292547 @default.
- W2541561231 hasConceptScore W2541561231C67337642 @default.
- W2541561231 hasConceptScore W2541561231C78434282 @default.
- W2541561231 hasLocation W25415612311 @default.
- W2541561231 hasOpenAccess W2541561231 @default.
- W2541561231 hasPrimaryLocation W25415612311 @default.
- W2541561231 hasRelatedWork W1521656931 @default.
- W2541561231 hasRelatedWork W1542749334 @default.
- W2541561231 hasRelatedWork W1751718452 @default.
- W2541561231 hasRelatedWork W1853960163 @default.
- W2541561231 hasRelatedWork W1969872244 @default.
- W2541561231 hasRelatedWork W2012104981 @default.
- W2541561231 hasRelatedWork W2095700588 @default.
- W2541561231 hasRelatedWork W2097512395 @default.
- W2541561231 hasRelatedWork W2115043302 @default.
- W2541561231 hasRelatedWork W2116469166 @default.
- W2541561231 hasRelatedWork W2116810825 @default.
- W2541561231 hasRelatedWork W2126530812 @default.
- W2541561231 hasRelatedWork W2138209285 @default.
- W2541561231 hasRelatedWork W2139568830 @default.
- W2541561231 hasRelatedWork W2150993312 @default.
- W2541561231 hasRelatedWork W2165072042 @default.
- W2541561231 hasRelatedWork W2170245008 @default.
- W2541561231 hasRelatedWork W2541979249 @default.
- W2541561231 hasRelatedWork W2544577072 @default.
- W2541561231 hasRelatedWork W2544799307 @default.
- W2541561231 isParatext "false" @default.
- W2541561231 isRetracted "false" @default.
- W2541561231 magId "2541561231" @default.
- W2541561231 workType "article" @default.