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- W2541926811 abstract "A new simulation model for Al reflow into submicron contact-holes and vias is developed for the first time. This model, the surface melting model, introduces surface tension driven mass transport of Al in a surface reflow layer whose thickness depends on the reflow temperature. Using this model in a quasi-3D computational fluid dynamics code, evolution of 3D Al surface topography during the reflow is accurately predicted from the initial Al step coverage and window curvature for a contact-hole. This physically based simulation identifies nature of the Al reflow. >" @default.
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- W2541926811 date "2002-12-17" @default.
- W2541926811 modified "2023-09-26" @default.
- W2541926811 title "Surface melting model for Al reflow into submicron contact-holes and vias" @default.
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- W2541926811 doi "https://doi.org/10.1109/iedm.1994.383346" @default.
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