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- W2542007152 abstract "On-site generated fluorine meets the sustainability requirements for the future of CVD thin-film process chamber cleaning. Rigorous industry safety standards are maintained, GWP and total carbon footprint impacts are greatly reduced, and significant process improvements are available." @default.
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- W2542007152 date "2008-10-01" @default.
- W2542007152 modified "2023-09-23" @default.
- W2542007152 title "Going green with on-site generated fluorine: Sustainable cleaning agent for CVD processes" @default.
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