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- W2542251261 abstract "A 0.05 /spl mu/m-PMOSFET has been fabricated for the first time, together with a 0.05 /spl mu/m-NMOSFET. For this process, ultra shallow source/drain junctions were developed on the basis of 5 keV ion implantation technology and rapid thermal annealing. The short channel effect was suppressed and Gm max reaches 460 mS/mm for NMOS and 380 mS/mm for PMOS. The delay time per stage of unloaded CMOS inverter is 13.1 psec at the supply voltage of 1.5 V. >" @default.
- W2542251261 created "2016-11-04" @default.
- W2542251261 creator A5005147126 @default.
- W2542251261 creator A5015506059 @default.
- W2542251261 creator A5019420217 @default.
- W2542251261 creator A5020765861 @default.
- W2542251261 creator A5026099164 @default.
- W2542251261 creator A5033534833 @default.
- W2542251261 creator A5047511438 @default.
- W2542251261 creator A5081889203 @default.
- W2542251261 date "2002-12-17" @default.
- W2542251261 modified "2023-09-27" @default.
- W2542251261 title "A 0.05 μm-CMOS with ultra shallow source/drain junctions fabricated by 5 keV ion implantation and rapid thermal annealing" @default.
- W2542251261 cites W1831310242 @default.
- W2542251261 cites W2064466978 @default.
- W2542251261 cites W2118686513 @default.
- W2542251261 cites W2140863276 @default.
- W2542251261 cites W2536686777 @default.
- W2542251261 cites W2546182664 @default.
- W2542251261 doi "https://doi.org/10.1109/iedm.1994.383363" @default.
- W2542251261 hasPublicationYear "2002" @default.
- W2542251261 type Work @default.
- W2542251261 sameAs 2542251261 @default.
- W2542251261 citedByCount "22" @default.
- W2542251261 crossrefType "proceedings-article" @default.
- W2542251261 hasAuthorship W2542251261A5005147126 @default.
- W2542251261 hasAuthorship W2542251261A5015506059 @default.
- W2542251261 hasAuthorship W2542251261A5019420217 @default.
- W2542251261 hasAuthorship W2542251261A5020765861 @default.
- W2542251261 hasAuthorship W2542251261A5026099164 @default.
- W2542251261 hasAuthorship W2542251261A5033534833 @default.
- W2542251261 hasAuthorship W2542251261A5047511438 @default.
- W2542251261 hasAuthorship W2542251261A5081889203 @default.
- W2542251261 hasConcept C11190779 @default.
- W2542251261 hasConcept C119599485 @default.
- W2542251261 hasConcept C121332964 @default.
- W2542251261 hasConcept C127413603 @default.
- W2542251261 hasConcept C145148216 @default.
- W2542251261 hasConcept C153294291 @default.
- W2542251261 hasConcept C159985019 @default.
- W2542251261 hasConcept C165801399 @default.
- W2542251261 hasConcept C172385210 @default.
- W2542251261 hasConcept C178790620 @default.
- W2542251261 hasConcept C185592680 @default.
- W2542251261 hasConcept C192562407 @default.
- W2542251261 hasConcept C197162436 @default.
- W2542251261 hasConcept C204530211 @default.
- W2542251261 hasConcept C27050352 @default.
- W2542251261 hasConcept C2777855556 @default.
- W2542251261 hasConcept C2778413303 @default.
- W2542251261 hasConcept C41823505 @default.
- W2542251261 hasConcept C46362747 @default.
- W2542251261 hasConcept C49040817 @default.
- W2542251261 hasConceptScore W2542251261C11190779 @default.
- W2542251261 hasConceptScore W2542251261C119599485 @default.
- W2542251261 hasConceptScore W2542251261C121332964 @default.
- W2542251261 hasConceptScore W2542251261C127413603 @default.
- W2542251261 hasConceptScore W2542251261C145148216 @default.
- W2542251261 hasConceptScore W2542251261C153294291 @default.
- W2542251261 hasConceptScore W2542251261C159985019 @default.
- W2542251261 hasConceptScore W2542251261C165801399 @default.
- W2542251261 hasConceptScore W2542251261C172385210 @default.
- W2542251261 hasConceptScore W2542251261C178790620 @default.
- W2542251261 hasConceptScore W2542251261C185592680 @default.
- W2542251261 hasConceptScore W2542251261C192562407 @default.
- W2542251261 hasConceptScore W2542251261C197162436 @default.
- W2542251261 hasConceptScore W2542251261C204530211 @default.
- W2542251261 hasConceptScore W2542251261C27050352 @default.
- W2542251261 hasConceptScore W2542251261C2777855556 @default.
- W2542251261 hasConceptScore W2542251261C2778413303 @default.
- W2542251261 hasConceptScore W2542251261C41823505 @default.
- W2542251261 hasConceptScore W2542251261C46362747 @default.
- W2542251261 hasConceptScore W2542251261C49040817 @default.
- W2542251261 hasLocation W25422512611 @default.
- W2542251261 hasOpenAccess W2542251261 @default.
- W2542251261 hasPrimaryLocation W25422512611 @default.
- W2542251261 hasRelatedWork W1536261666 @default.
- W2542251261 hasRelatedWork W1882062390 @default.
- W2542251261 hasRelatedWork W1885779599 @default.
- W2542251261 hasRelatedWork W1925119312 @default.
- W2542251261 hasRelatedWork W2050448700 @default.
- W2542251261 hasRelatedWork W2100821658 @default.
- W2542251261 hasRelatedWork W2106309050 @default.
- W2542251261 hasRelatedWork W2106498157 @default.
- W2542251261 hasRelatedWork W2112913539 @default.
- W2542251261 hasRelatedWork W2122591935 @default.
- W2542251261 hasRelatedWork W2124251489 @default.
- W2542251261 hasRelatedWork W2142218455 @default.
- W2542251261 hasRelatedWork W2160840734 @default.
- W2542251261 hasRelatedWork W2161014101 @default.
- W2542251261 hasRelatedWork W2168723454 @default.
- W2542251261 hasRelatedWork W2170935054 @default.
- W2542251261 hasRelatedWork W2538168493 @default.
- W2542251261 hasRelatedWork W2543937714 @default.
- W2542251261 hasRelatedWork W2545176521 @default.
- W2542251261 hasRelatedWork W2546182664 @default.
- W2542251261 isParatext "false" @default.
- W2542251261 isRetracted "false" @default.
- W2542251261 magId "2542251261" @default.
- W2542251261 workType "article" @default.