Matches in SemOpenAlex for { <https://semopenalex.org/work/W2542512650> ?p ?o ?g. }
Showing items 1 to 84 of
84
with 100 items per page.
- W2542512650 abstract "Physical mechanism of direct tunneling in unstressed and stressed gate oxides thinner than 5 nm is experimentally investigated. It is revealed that the direct tunneling current in an unstressed MOS (n/sup +/-poly Si/SiO/sub 2//Si substrates) structure has a strong bias polarity dependence, which is determined through the competing effects of tunneling probability and the number of tunneling carriers. It is also found that a leakage path allowing the flow of holes dominates SILC and leakage current after soft breakdown in stressed oxides less than 5 nm. This leakage path has the asymmetric carrier conduction property that current from the Si substrate is much larger than that from the n/sup +/-poly gate." @default.
- W2542512650 created "2016-11-04" @default.
- W2542512650 creator A5033762025 @default.
- W2542512650 creator A5042410367 @default.
- W2542512650 creator A5064831753 @default.
- W2542512650 date "2003-01-22" @default.
- W2542512650 modified "2023-09-26" @default.
- W2542512650 title "Experimental examination of physical model for direct tunneling current in unstressed/stressed ultrathin gate oxides" @default.
- W2542512650 cites W2067431559 @default.
- W2542512650 doi "https://doi.org/10.1109/iedm.1999.824193" @default.
- W2542512650 hasPublicationYear "2003" @default.
- W2542512650 type Work @default.
- W2542512650 sameAs 2542512650 @default.
- W2542512650 citedByCount "14" @default.
- W2542512650 countsByYear W25425126502012 @default.
- W2542512650 crossrefType "proceedings-article" @default.
- W2542512650 hasAuthorship W2542512650A5033762025 @default.
- W2542512650 hasAuthorship W2542512650A5042410367 @default.
- W2542512650 hasAuthorship W2542512650A5064831753 @default.
- W2542512650 hasConcept C119599485 @default.
- W2542512650 hasConcept C120398109 @default.
- W2542512650 hasConcept C121332964 @default.
- W2542512650 hasConcept C127413603 @default.
- W2542512650 hasConcept C139719470 @default.
- W2542512650 hasConcept C152909973 @default.
- W2542512650 hasConcept C159985019 @default.
- W2542512650 hasConcept C162324750 @default.
- W2542512650 hasConcept C165801399 @default.
- W2542512650 hasConcept C172100665 @default.
- W2542512650 hasConcept C172385210 @default.
- W2542512650 hasConcept C191897082 @default.
- W2542512650 hasConcept C192562407 @default.
- W2542512650 hasConcept C2361726 @default.
- W2542512650 hasConcept C26873012 @default.
- W2542512650 hasConcept C2777042071 @default.
- W2542512650 hasConcept C2779851234 @default.
- W2542512650 hasConcept C49040817 @default.
- W2542512650 hasConcept C86642149 @default.
- W2542512650 hasConceptScore W2542512650C119599485 @default.
- W2542512650 hasConceptScore W2542512650C120398109 @default.
- W2542512650 hasConceptScore W2542512650C121332964 @default.
- W2542512650 hasConceptScore W2542512650C127413603 @default.
- W2542512650 hasConceptScore W2542512650C139719470 @default.
- W2542512650 hasConceptScore W2542512650C152909973 @default.
- W2542512650 hasConceptScore W2542512650C159985019 @default.
- W2542512650 hasConceptScore W2542512650C162324750 @default.
- W2542512650 hasConceptScore W2542512650C165801399 @default.
- W2542512650 hasConceptScore W2542512650C172100665 @default.
- W2542512650 hasConceptScore W2542512650C172385210 @default.
- W2542512650 hasConceptScore W2542512650C191897082 @default.
- W2542512650 hasConceptScore W2542512650C192562407 @default.
- W2542512650 hasConceptScore W2542512650C2361726 @default.
- W2542512650 hasConceptScore W2542512650C26873012 @default.
- W2542512650 hasConceptScore W2542512650C2777042071 @default.
- W2542512650 hasConceptScore W2542512650C2779851234 @default.
- W2542512650 hasConceptScore W2542512650C49040817 @default.
- W2542512650 hasConceptScore W2542512650C86642149 @default.
- W2542512650 hasLocation W25425126501 @default.
- W2542512650 hasOpenAccess W2542512650 @default.
- W2542512650 hasPrimaryLocation W25425126501 @default.
- W2542512650 hasRelatedWork W1204558397 @default.
- W2542512650 hasRelatedWork W1782685298 @default.
- W2542512650 hasRelatedWork W1975737188 @default.
- W2542512650 hasRelatedWork W1980306891 @default.
- W2542512650 hasRelatedWork W2024506511 @default.
- W2542512650 hasRelatedWork W2046413179 @default.
- W2542512650 hasRelatedWork W2055138041 @default.
- W2542512650 hasRelatedWork W2056218027 @default.
- W2542512650 hasRelatedWork W2067441653 @default.
- W2542512650 hasRelatedWork W2074059639 @default.
- W2542512650 hasRelatedWork W2104670757 @default.
- W2542512650 hasRelatedWork W2115864302 @default.
- W2542512650 hasRelatedWork W2121437544 @default.
- W2542512650 hasRelatedWork W2534585620 @default.
- W2542512650 hasRelatedWork W2543862329 @default.
- W2542512650 hasRelatedWork W2544964708 @default.
- W2542512650 hasRelatedWork W2971599279 @default.
- W2542512650 hasRelatedWork W2981278809 @default.
- W2542512650 hasRelatedWork W3165791773 @default.
- W2542512650 hasRelatedWork W2099618690 @default.
- W2542512650 isParatext "false" @default.
- W2542512650 isRetracted "false" @default.
- W2542512650 magId "2542512650" @default.
- W2542512650 workType "article" @default.