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- W2543169610 abstract "An algorithm using only transmission measurements to calculate the complex permittivity of p-type and n-type silicon semiconductor wafers using a spot-focused free-space measurement system was developed. The dielectric constant obtained was close to published values for silicon wafers. The errors associated with the measurement of the complex permittivity values are discussed, and comparisons between the measured and calculated magnitude and phase of the forward reflection and transmission coefficients are presented. In this method, the free-space reflection and transmission coefficients, S/sub 11/ and S/sub 21/, are measured for a silicon wafer sandwiched between two teflon plates which are quarter-wavelength at midband. The actual reflection and transmission coefficient, S/sub 11/ and S/sub 21/ of the silicon wafers are then calculated from the measured S/sub 11/ and S/sub 21/ by using ABCD matrix transformation in which the complex permittivity and thickness of the teflon plates are known. Results are reported in the frequency range of 8-12.5 GHz." @default.
- W2543169610 created "2016-11-04" @default.
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- W2543169610 date "2005-04-06" @default.
- W2543169610 modified "2023-09-24" @default.
- W2543169610 title "Accuracy considerations for dielectric measurements of semiconductor wafers using free space microwave measurement system in 8-13 GHz range" @default.
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- W2543169610 doi "https://doi.org/10.1109/rfm.2004.1411103" @default.
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