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• W2543224128 abstract "MMI (multimode interference) coupler, modulator and switch based on SOI (silicon-on-insulator) have been become more and more attractive in optical systems since they show important performances. SiO/sub 2/ thin cladding layers (<1.0 /spl mu/m) can be used in SOI waveguide due to the large index step between Si and SiO/sub 2/, making them compatible with the VLSI technology. The design and fabrication of multimode interference (MMI) optical coupler, modulator and switch in SOI technology are presented in the paper. The results demonstrated that the modulator has an extinction ratio of -11.0 dB and excess loss of -2.5 dB, while the optical switch has a crosstalk of -12.5 dB and responding time of less than 20 -s." @default.
• W2543224128 created "2016-11-04" @default.
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• W2543224128 date "2004-05-13" @default.
• W2543224128 modified "2023-09-28" @default.
• W2543224128 title "MMI optical couplers and switches with SOI technology" @default.
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• W2543224128 doi "https://doi.org/10.1109/cos.2003.1278216" @default.
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